Junrui
Chen
*,
Kapil
Bhardwaj‡
and
Sandro
Carrara
Bio/CMOS Interfaces Lab, Institute of Electrical and Micro Engineering, Engineering Faculty, École Polytechnique Fédérale de Lausanne, Rue de la Maladiere 71b, Neuchatel, 2000, Switzerland. E-mail: junrui.chen @epfl.ch
First published on 19th February 2025
Memristors are garnering significant attention due to their high similarity to biological neurons and synapses, alongside their unique physical mechanisms. Biosensors exhibiting memristive behaviour have demonstrated substantial efficacy in detecting therapeutic and biological compounds in the past decade. This report investigates silicon nanowire (SiNW)-based devices incorporating Schottky barriers, which exhibit potential for memristive behaviour. The SiNWs are fabricated between two nickel (Ni) pads, defined as 1.5 μm in length and 90 nm in width, then forming a quasi-one-dimensional (1D) back-to-back Schottky diode structure due to their large aspect ratio. After oxygen plasma treatment of the SiNW, this back-to-back diode structure begins to exhibit memristive behaviour. Our experimental data indicate that this behaviour is induced by superficial oxygen along the SiNW and is influenced by the contacts within the Schottky barrier and the intermediate silicon oxide layer. Furthermore, we have developed a mathematical model derived from the thermal emission equation of Schottky diodes to accurately characterize and understand this memristive behaviour. Thanks to this model, it is possible to accurately fine-tune the design of memristive devices for application in neuromorphic computing and memristive biosensing.
The memristive property was leveraged for the first time in the bio-sensing field by our group in 2011, under the term “memristive biosensor”.10 An extensive review detailing several “memristive biosensors” can be found in the study by Carrara.11 In the context of biosensing, SiNWs are particularly significant due to their substantial aspect ratio and role as a Bio/CMOS interface. SiNW-based biosensors have demonstrated their efficacy in detecting a range of biomolecules, including DNA, proteins, and therapeutic compounds.12–14 A thorough examination of their applications in carcinoma diagnosis is provided in the comprehensive review by M.-A. Doucey and S. Carrara.15 SiNW-based memristive biosensors have shown remarkable potential as highly sensitive tools for protein measurement, enabling precise and efficient detection in diverse biological contexts.16,17 These advancements highlight the far-reaching implications and multifold nature of memristive device research in academia. A critical observation is that upon biofunctionalization, the characteristic memristive pinched current–voltage (I–V) curves are typically lost, leading to the definition of a new parameter known as the “voltage gap”,18 and it has been observed for the first time in naked nanowires too.19 This voltage gap exhibits a proportionality to the concentration of target biomolecules, returning unprecedented limits-of-detection as a biosensing parameter. Collectively, these developments highlight the vast potential and broad applicability of memristive devices in the field of biosensors. In this field, we conclude from our past results that our memristive devices based on SiNWs predominantly exhibit a non-crossing anti-clockwise loop, indicating a volatile resistive switching behaviour. A recent study highlights that the I–V hysteresis exhibited by bio-functionalized nanowires is determined by their inherent memristive characteristics and the induced capacitive effect caused by the charged biomolecules.20 This insight further emphasizes the potential of SiNW-based memristive biosensors in detecting and analyzing biological compounds with high sensitivity and specificity.
Nevertheless, the mechanism responsible for the origin of this volatile memristive behaviour in quasi-1D structure still eludes a full understanding. The resistive switching effect produced by most of the popular memristive architectures belongs to the formation of a conductive filament (CF) inside a dielectric medium.21–23 The CF memristive device is typically known for its characteristic “sandwich-like” structure,24 which comprises a thin dielectric layer positioned between the bottom and top electrodes, e.g., in a highly limited volume toward the quasi-0 structure. On the other hand, resistive switching has been observed in several kinds of 1D and 2D structures made of, while not limited to, silicon,19 gold,25 graphene,26 and organic polymers.27 These further switching structures are challenging since they do not present the possibility of forming conductive filaments, due to the long length of the conductive channel. Therefore, 1D memristive devices are not simply explained by the CF model.
In addition, the utilization of metal–semiconductor (Schottky) contacts has emerged as a promising alternative for non-filamentary memristive devices, as evidenced by several academic studies.28–34 Notably, a recent research endeavour led by Zhou et al.35 introduces a two-dimensional structure based on back-to-back Schottky diodes connected through a planar channel semiconductor. The resulting device exhibits both crossing and non-crossing hysteresis loops for varying voltage sweep, which are associated with volatile and non-volatile switching,36 respectively. The switching mechanism in the reported structure has been attributed to the migration of defects, resulting in the redistribution of defect concentration within the device. Consequently, alterations in defect concentration and the Schottky barrier at the contacts lead to variations in contact resistance as well as in the resistance of the semiconductor layer. Thus, Schottky-diode-modulated memristive devices basically rely on the interplay of various mechanisms, including defect redistribution, charge carrier mobility, Schottky barrier height (SBH), and interface properties. Changes in any of these factors can impact the memristive properties of the device.36
Interestingly, an effective quasi-1D memristive device has been realized utilizing a ZnO nanowire, incorporating Schottky contacts in both terminals.37 In this device, the induction of a low-resistance state is achieved through the accumulation of vacancies in the barrier enhancement layer, resulting in the formation of local conductive filament channels upon the application of external voltage. By tuning the set/reset voltage, the ZnO based device presents non-volatile memristive behaviour. Besides tuning of the SBH, the trap-assisted tunneling effect through the Schottky barrier at the metal electrode contact has been demonstrated as a pivotal factor in eliciting both volatile and non-volatile memristive behaviour, particularly in oxide-based devices.38
Enhancing the comprehension of the mechanisms and modelling underlying volatile memristive behaviour is crucial for optimizing the fabrication of memristive biosensors. This is particularly significant when considering the modeling of the capacitive-coupled effect induced by absorbed biomolecules.20,39 Therefore, this report aims to utilize experimental data to uncover the origins of volatile memristive behaviour and to identify the factors influencing the switching properties in SiNW-based memristors.
The report describes the fabrication of the devices, realized with central SiNWs connected between two nickel/nickel silicide (Ni/NiSi) electrodes, which form a back-to-back diode structure connected through a silicon channel. Our findings, both experimental and theoretical, clearly demonstrate that a pure diode structure is unable to explain the measured hysteresis. Robust volatile memristive properties are observed after the device undergoes native oxidation or oxygen plasma treatments. The extent of hysteresis is highly influenced by the SBH and by the characteristics of the oxide intermediate layer.
Model simulations perfectly align with the fabricated device and demonstrate no hysteresis for the newly fabricated samples. To explain the influence of the surface oxide layer, an energy-based model is introduced, revealing the origin of the volatile memristive behaviour.
The main scientific contributions of this article are as follows:
1. Developing the robust memristive behaviour in a quasi-1D nanostructure;
2. Experimentally demonstrating that the surface oxide layer is the key factor inducing memristive behaviour, with its properties influenced by Schottky contacts.
3. Promoting an energy-based model that closely aligns with the observed behaviour.
Another EBL process was employed using a 100 nm thick layer of hydrogen silsesquioxane (HSQ) as a negative-tone resist. After exposure and development, the substrate underwent deep reactive ion etching (DRIE), also known as the “Bosch process”, to create the silicon nanowires. This process involved alternating etching and passivation steps using SF6 (etching gas) and C4F8 (passivation gas) in a cyclic manner. As a result, stacked silicon nanowires were formed, leaving them suspended between the NiSi contacts. Lastly, the HSQ resist was stripped in a solution comprising 1% HF for 1 minute. The application of 1% HF served a dual purpose: it stripped the HSQ resist and potentially eliminated oxide layers from the SiNW surface. A more comprehensive schematic can be found in Fig. S1.† The defined SiNWs were captured using a scanning electron microscope (SEM).
Fig. 2(a) presents the I–V curve of the brand new fabricated device. It clearly shows a typical electrical property of a back-to-back diode structure. When an external voltage is applied to the device, there is always one diode that is reverse biased, indicating that the maximum current is constrained by the Schottky contacts as saturation current I0 described by a typical thermal emission model in eqn (1),45
![]() | (1) |
With the native oxidation of the silicon nanowires, and then with the oxygen progressively doping the silicon surface, the I–V curve during this period (Fig. 2(b and c)) manifests an unpredictable resistance state, exhibiting diverse memristive characteristics. As the oxidation process in open air approaches equilibrium after five days, the I–V curve attains a relatively stable state, revealing pronounced and repeatable analog volatile hysteretic behaviour, as presented in Fig. 2(d). An abrupt resistance change occurs when the sweep starts at −4 V in phase ⓪. As the voltage increases, the current eventually stabilizes at the saturation current I0, as depicted in Fig. 2(a–c), constrained by the Schottky contacts. Phases ① and ③ exhibit a low resistance state as the voltage decreases, while phases ② and ④ exhibit a high resistance state as the voltage increases. From Fig. 2(d), we can conclude that the resistive-switching occurs before the current reaches its maximum I0.
As the devices are newly fabricated, the hysteresis is negligible as presented in the semi-logarithmic curve shown in Fig. 3(a). After oxygen plasma treatment, a very evident hysteresis appears, as shown in Fig. 3(b). A repeatable volatile memristive behaviour following oxygen plasma treatment within a 4 V voltage window is depicted in Fig. 3, referring to the demonstration of the stability of the device. Fig. 3(c) shows the same anti-clockwise pinched hysteresis previously obtained with the natural oxidation process illustrated in Fig. 2(d). Consistently with the observations in Fig. 2(d), an abrupt conductance change is evident when the sweep commences at −4 V.
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Fig. 3 The log![]() |
The reason for this abrupt conductance change is distinctly elucidated by applying a constant external voltage to the device before and after the oxygen plasma treatment. The voltage remains at 4 V; meanwhile, 200 measurements are acquired each at 6 ms. The resulting I–V curves are shown in Fig. 4. With the device before the plasma treatment, the current remains around 15 nA, consistent with the constrained current observed in Fig. 2(a). On the other hand, a clear variation in conductance is observed in the device as measured after the oxygen plasma treatment. The current gradually increases from almost 0 A to approximately 12 nA, indicating a transition from a high-resistance state to a low-resistance state. This conductance change corresponds to the phase labeled ⓪ in Fig. 2(d). These data clearly demonstrate that the injection of carriers due to an applied voltage as per the memristive effect is possible only in the presence of oxygen in the silicon nanowires. Moreover, when the input starts at 1 V (Fig. 4b), the current remains around 10 pA. Upon increasing the voltage to 4 V, the current rises gradually, indicating a transition to the switch-on state. When the voltage returns to 1 V, the current decreases accordingly, reverting to the switch-off state, thereby demonstrating volatile behaviour.
![]() | ||
Fig. 4 (a) Current measurement at constant 4 V input before and after oxygen plasma treatment (OPT). (b) Volatility test. |
As originally predicted by the modeling proposed for 0D memristive devices1 the switching behaviour of memristors is expected going down with the sweeping-frequency of the applied voltage going up.47 Our memristive devices are subject to the same phenomenon as well. The source measure unit is used to demonstrate this property by supplying sweeps at different scanning rates. As shown in Fig. 5, memristive loops are obtained with scanning rates from 4 V s−1 down to 0.5 V s−1. However, it is evident that the extent of the hysteresis loop becomes more pronounced by decreasing the scanning rate. This observation corresponds to the result previously reported in the literature that shows smaller frequencies leading to more memristive properties.
Intuitively, we see that also using a simple expression in circuitry, E = VIt. It easily confirms that when the scanning rate decreases, which means a larger period t, the hysteresis loop moves towards the original point as shown in Fig. 5, meaning less voltage is required correspondingly. This simple energy-related consideration will guide us to the modeling and simulations shown later in section 4.
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Fig. 6 Schottky barrier tuning: (a) the Si–Ni contacts annealing observed in SEM images and (b) the memristive behaviour related to different annealing scenarios. |
Given the thin Ni layer, BSD is further employed from the top side to observe the atomic distribution at the edge of Ni deposition. Without annealing, the high SBH between Si and Ni results in an unfocused electron beam and a blurred image at 30k × magnification, as shown in the bottom image. Energy-dispersive X-ray (EDX) analysis in this case detects only Ni atoms. Annealed devices under conditions of 400 °C for 20 minutes and 400 °C for 40 minutes, as depicted in Fig. 6(a)I and II, exhibit the presence of NiSi grains on the surface. Atomic diffusion extends up to 375 nm from the Ni edge. EDX analysis reveals a composition of 5.11% Si and 94.89% Ni by mass. With prolonged annealing for another 20 minutes, the diffusion length increases to 825 nm, and the EDX analysis indicates a Si content of 7.28% and a Ni content of 92.72%.
The measured I–V curves are illustrated in Fig. 6(b), exhibiting a shape aligned to that in Fig. 5. The volatile memristive behaviour also shows a comparable trend when altering annealing conditions. As the device undergoes more extensive annealing, the saturation current also varies. The read-out saturation currents I0H is 12.2 nA, I0M is 7.8 nA, and I0L is 2.3 nA under annealing conditions of 400 °C for 40 minutes, 400 °C for 20 minutes, and no annealing, respectively.
When Ni is in direct contact with Si, the SBH is determined by the difference in their work functions and the alignment of their Fermi levels. However, during annealing, Ni reacts with Si to form the compound nickel silicide. This reaction changes the electronic state density and chemical properties at the interface, resulting in a modified SBH. Furthermore, the compound phase has a distinct work function compared to pure Ni, which directly influences the barrier height concurrently; the experimental data in Fig. 6(b) demonstrate that the saturation current I0 increases with the annealing. Coherently with the eqn (1),
I0 ∝ exp![]() | (2) |
In this series of different fabrications, layers with various thicknesses of silicon oxide were sputtered onto the silicon-on-insulator chip before the deposition of Ni, in order to ensure the presence of an oxide layer between Ni and Si. Three scenarios are considered here: 0 nm, 10 nm, and 20 nm of oxide layer, as schematically sketched in Fig. 7(a). Under optical-microscopic examination, the standardized annealing process (400 °C for 20 or 40 minutes) results in Schottky contact surface colors of yellow or white, while no annealing results in orange as shown in Fig. 7(b). The I–V characteristics of these three different fabrications have been acquired after the oxygen plasma treatment (OPT) of the quasi-1D silicon channel and are presented as well in Fig. 7(b). In the absence of an oxide layer, the memristive behaviour, represented by the red curve, resembles that shown in Fig. 3(c). The green and black curves represent the cases of 10 nm and 20 nm oxide layers, respectively. The presence of the oxide layer alters the memristive behaviour, notably enlarging the hysteresis loop in the positive voltage region compared to the negative voltage region.
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Fig. 7 (a) Schematic of the intermediate oxide layer. (b) Memristive behaviour with different thicknesses of different intermediate oxide layers. |
Fig. 7(b) shows that, at −4 V, the I–V curve for the 20 nm oxide layer (black curve) starts at a lower current compared to that of the 10 nm oxide layer (green curve). Interestingly, a thicker oxide layer corresponds to a higher maximum current. At the beginning of the backward sweep, the current continues to increase despite the voltage starting to decrease. This indicates a more complex underlying mechanism compared to that depicted in Fig. 3. The switching mechanism involving the intermediate oxide layer has been extensively discussed by Mehonic et al. in prior studies.48 In the forward sweep, initially at −4 V, the current is impeded by the insulating silicon oxide layer, resulting in significantly lower currents with respect to the current we measured at −3.9 nA. Then, the formation of conductive filaments within the oxide layer, driven by oxygen vacancies and ions, begins under the negative applied voltage.49 As the voltage continues to be applied, a substantial number of conductive bridges are formed, then leading to a scenario where the current continues to increase even as the applied voltage decreases during the backward sweep. The thicker oxide layer provides more oxygen vacancies, then more conductivity at the nanoampere scale.
VAB = VDl + VSi + VDr. | (3) |
In such a scheme, there is always at least one diode operating in a reverse-biased configuration. For instance, if the current flows from node A to B, diode Dl is forward biased while Dr is reverse biased. This is expressed as the following:
RDr ≫ RDl, RDr ≫ RSi | (4) |
which leads to,
VAB ≈ VDr | (5) |
Fig. 8(c) presents a static I–V curve of a single diode. It comprises three distinct regions: the breakdown region, reverse saturation region, and thermionic emission region. The thermionic emission and the saturation current of the diode are both involved in the Shockley diode equation:50,51
![]() | (6) |
Here, the saturation current I0 is obtained using the eqn (1), and V represents the voltage applied across the diode. Vt = ηkBT/q is the thermal voltage, where η is the ideal factor usually chosen as 150,52 in a regular Schottky diode. Eqn (5) suggests that the device operation is mainly governed by the reverse-biased diode. Thus, the area of interest labeled with a red frame in Fig. 8(c) is only the reverse biased region before breaking down. This region is defined as the following:
|VAB| < |Vbd|. | (7) |
Thus, the current going through the device in one direction is written as the following:
![]() | (8) |
As discussed above, the electrical behaviour of the Schottky-barrier modulated SiNW can be described by the operation of a reverse-biased diode in both negative/positive cycles of the input signal. Fig. 8(d) shows an I–V characteristic model curve representing the integration of two back-to-back diodes. In the area of |VAB| < |VS|, the dashed line represents the dominance of carriers generated by the thermionic emission (gradual increase in current), while the solid current denotes the saturation due to the energy barrier (constant current). As a result, the conduction characteristic of the back-to-back diode structure can be split into five regions separated by the breakdown voltages and saturation voltages marked with green circles, where the area of interest is marked with a red frame as defined using eqn (7). Consequently, the current going through the device under voltage sweep can be described in eqn (9) within the “area of interest”:
![]() | (9) |
By using eqn (9), we conducted MATLAB mathematical simulations using an array as a window of input voltages to obtain an array of computed current values. The accordingly-obtained normalized I–V characteristics are depicted in Fig. 9. In addition, a brand-new fabricated device, as seen in section 2, manifests nearly superimposed curves during both forward and backward sweeps, as per the measured result in Fig. 2(a), which corroborates the model.
ΔϕB ∝ (ϕB + VR − ϕp)¼ | (10) |
![]() | (11) |
![]() | (12) |
For an instantaneous moment, the instant input energy δEin is defined as the following:
δEin = Ksln![]() | (13) |
Ein = ∑δEnin. | (14) |
Solving with an iterative way, the adjusted I–V relationship can be then described as the following:
![]() | (15) |
Finally, the mathematical model to simulate the memristive behaviour of back-to-back diode structure is written as eqn (16), combined with eqn (15).
![]() | (16) |
By adjusting the parameters, the simulated results closely align with the experimental data, as demonstrated in Fig. 10. In Fig. 10(a), the simulated memristive behaviour is shown with I0 to 10 nA. The actual I–V curve, presented in Fig. 10(b), corresponds to a representative sample of an annealed device with a saturation current of approximately 12 nA. When I0 is reduced to 2 nA as shown in Fig. 10(c), the memristive behaviour exhibits a more pronounced hysteresis. This aligns with the behaviour of an unannealed device, which has a higher SBH. Correspondingly, as seen in Fig. 10(d), an unannealed device with a SBH shows a saturation current of around 2 nA, matching the simulated behaviour. This comparison confirms that the simulation results accurately replicate the actual device characteristics under different conditions, demonstrating a strong alignment between the model and experimental observations. For more details on simulation, see the ESI, in Fig. S2 and S3† for the frequency-dependent behaviour and Schottky barrier influence, respectively.
To better understand this type of volatile memristive behaviour, an 8 V voltage window is used to highlight the key features, as shown in Fig. 11:
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Fig. 11 The key features of a complete non-crossing anti-clockwise hysteresis loop with an input voltage window (8 V). |
The simulation using eqn (16) successfully reproduces these four key features, aligning well with the experimental observations.
Notably, for this single device shown in Fig. 11, the saturation current in the negative region is higher than that in the positive region, attributed to fabrication errors at the Schottky contacts. Consequently, the hysteresis in the negative region is noticeably thinner than that in the positive region. This behaviour is consistent with the results shown in Fig. 6, where a higher SBH leads to more pronounced memristive hysteresis.
This observation underscores that, although unpredictable errors may occur during actual fabrication, the overall results remain highly consistent with the fundamental principles derived in this paper. This demonstrates that, even under complex fabrication conditions, the proposed model and principles are highly applicable and reliable, offering both theoretical guidance and experimental validation for the further optimization and design of similar devices.
The several pieces of evidence investigated in this report also play a key role in designing and optimizing memristive biosensors. Therefore, this research ultimately paves the way for a better development of new categories of volatile memristive devices and guides further more precise designs in memristive biosensing.
Footnotes |
† Electronic supplementary information (ESI) available. See DOI: https://doi.org/10.1039/d5nr00104h |
‡ Current affiliation: Thin Film Electronics Lab, Faculty of Information Technology and Communication Sciences, Tampere University, Finland. |
This journal is © The Royal Society of Chemistry 2025 |