Issue 20, 2019

Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

Abstract

Many microelectronic devices require thin films of silver or gold as wiring layers. We report silver(I) and gold(I) bicyclic amidinate complexes, wherein the constrained ligand geometry lessens the propensity for thermal decomposition. These new volatile compounds provide metallic films of silver and gold during CVD with hydrogen below 230 °C.

Graphical abstract: Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

Supplementary files

Article information

Article type
Communication
Submitted
20 Mac 2019
Accepted
29 Apr 2019
First published
29 Apr 2019

Dalton Trans., 2019,48, 6709-6713

Author version available

Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

L. Tong, L. M. Davis, X. Gong, J. Feng, E. S. Beh and R. G. Gordon, Dalton Trans., 2019, 48, 6709 DOI: 10.1039/C9DT01202H

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