Tuning of the interval in a nanohole array of anodic porous alumina through deformation of polymer templates

Abstract

A new type of process for the fabrication of ideally ordered anodic porous alumina with the desired hole interval based on the deformation of a polymer template and the subsequent formation of a metal mold is described. In this process, a pattern composed of an ordered array of concave structures is first prepared on a polymer sheet by imprinting using a starting metal (Ni) mold, and the interval in the pattern is tuned through the deformation of the polymer sheet. The Ni mold with the pattern having the tuned interval is formed by the electroplating of Ni using the polymer sheet as a template. Finally, the pretexturing of Al by imprinting using the obtained Ni mold and subsequent anodization generate ideally ordered anodic porous alumina with the desired hole interval.