Issue 46, 2016, Issue in Progress

A sub-200 nanometer wide 3D stacking thin-film temperature sensor

Abstract

We developed a series of thin-film thermocouples (TFTCs) made from Cr, Au, and Pd long stripes with a width of 90–300 nm and a 10 nm insulating HfO2 layer. The sensors have a three-dimensional sandwich structure, therefore reducing the total width down to 138 nm. Their sensitivity (thermopower) values were measured to be 9.6 ± 0.7 μV K−1 for the Cr/HfO2/Pd sensors and 3.6 ± 0.1 μV K−1 for the Au/HfO2/Pd sensors. These sensors showed reproducible and reliable measurement performance with a good temperature resolution of 0.04–0.1 K and a small heat capacity of 3.2–3.5 × 10−14 J per K per micron length, making them promising candidates for applications in electronic devices, microfluidic systems, and single cell or sub-cell detection as built-in sensors.

Graphical abstract: A sub-200 nanometer wide 3D stacking thin-film temperature sensor

Article information

Article type
Communication
Submitted
09 Mar 2016
Accepted
06 Apr 2016
First published
07 Apr 2016

RSC Adv., 2016,6, 40185-40191

A sub-200 nanometer wide 3D stacking thin-film temperature sensor

X. Huo, Z. Wang, M. Fu, J. Xia and S. Xu, RSC Adv., 2016, 6, 40185 DOI: 10.1039/C6RA06353E

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