Jump to main content
Jump to site search

Issue 18, 2015
Previous Article Next Article

SAW-based fluid atomization using mass-producible chip devices

Author affiliations


Surface acoustic wave (SAW)-based fluid atomizers are ideally suited to generate micrometer-sized droplets without any moving parts or nozzles. Versatile application fields can be found for instance in biomedical, aerosol or thin film technology, including medical inhalators or particle deposition for advanced surface treatment. Such atomizers also show great potential for on-chip integration and can lead to economic production of hand-held and even disposable devices, with either a single functionality or integrated in more complex superior systems. However, this potential was limited in the past by fluid supply mechanisms inadequate for mass production, accuracy and reliability. In this work, we briefly discuss existing fluid supply methods and demonstrate a straightforward new approach suited for reliable and cost-effective mass-scale manufacturing of SAW atomizer chips. Our approach is based on a fluid supply at the boundary of the acoustic beam via SU-8 microchannels produced by a novel one-layer/double-exposure photolithography method. Using this technique, we demonstrate precise and stable fluid atomization with almost ideal aerosol plume geometry from a dynamically stabilized thin fluid film. Additionally, we demonstrate the possibility of in situ altering the droplet size distribution by controlling the amount of fluid available in the active region of the chip.

Graphical abstract: SAW-based fluid atomization using mass-producible chip devices

Back to tab navigation

Supplementary files

Publication details

The article was received on 01 Jul 2015, accepted on 27 Jul 2015 and first published on 28 Jul 2015

Article type: Paper
DOI: 10.1039/C5LC00756A
Author version
Download author version (PDF)
Lab Chip, 2015,15, 3793-3799

  •   Request permissions

    SAW-based fluid atomization using mass-producible chip devices

    A. Winkler, S. M. Harazim, S. B. Menzel and H. Schmidt, Lab Chip, 2015, 15, 3793
    DOI: 10.1039/C5LC00756A

Search articles by author