The design of novel alkylated norcamphor derivatives that undergo cyclopolymerization is explored; the resulting polymers incorporate suitable functional groups for chemical amplification and show excellent imaging characteristics under lithographic exposure at 193 nm.
R. P. Meagley, D. Pasini, L. Y. Park and J. M. J. Fréchet, Chem. Commun., 1999, 1587 DOI: 10.1039/A902405K
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