Surface analysis with the glow discharge lamp. State of the art and prospects for future development

Abstract

A brief history of the development of glow discharge optical emission spectrometry (GD-OES) for in-depth profiling is given and the basic operating principles are described. Some of the most important technical applications of GD-OES are discussed. The state-of-the-art concerning quantitative surface analysis with GD-OES is presented and two different approaches to this problem are described. The prospects for further development of the methods for quantitative surface analysis are also discussed.