Glow discharge sputtering and excitation characteristics of brass alloys

Abstract

Studies were carried out in an attempt to elucidate the role that alloy (sample) components have on the atomisation and excitation characteristics of glow discharge devices. A series of α-phase brass alloys were sputtered to determine net sputter rates and yields. Results of the alloy yields were compared with calculated values based on the sputter yields of the pure metals. Auger electron spectroscopy was employed to ascertain the extent of preferential sputtering in a brass alloy. Results indicated that zinc sputters at a rate 1.3 times that of copper. Auger electron spectroscopy was also employed to evaluate the elemental composition of the plasma which was sampled as a deposited thin film. The effect of the sample matrix on plasma excitation characteristics was investigated using excitation temperature measurements. Temperatures varied by less than 10% for each of the Ar l pairs employed over the alloy composition range.