Osma J.
Gomez
a,
Adam
Antar
b,
Alex T.
Hall
c,
Leopoldo
Tapia-Aracayo
c,
Joshua
Seo
a,
Nam
Kim
a,
Zihan
Sun
a,
Ryan
Lim
a,
Fu
Chen
a,
Yue
Li
a,
John
Cumings
c,
Gary
Rubloff
cd,
Sang Bok
Lee
*a,
David
Stewart
*c and
Yang
Wang
*a
aDepartment of Chemistry and Biochemistry, University of Maryland, College Park, MD 20742, USA. E-mail: ywang16@umd.edu
bDepartment of Mechanical Engineering, University of Maryland, College Park, MD 20742, USA. E-mail: steward@umd.edu
cDepartment of Materials Science and Engineering, University of Maryland, College Park, MD 20742, USA. E-mail: slee@umd.edu
dInstitute for Systems Research, University of Maryland, College Park, MD 20742, USA
First published on 10th July 2025
We present a facile, solution-based approach to prepare bulk lithium phosphorus oxynitride (LiPON) utilizing a stepwise reduction between lithium tert-butoxide (LiOtBu) and a phosphazene base, diethyl phosphoramidate (DEPA), which are also precursors used in LiPON synthesis by atomic layer deposition (ALD). The study finds that the two ALD LiPON precursors can readily react upon mixing in THF at room temperature, which yields an ionically conductive solid powder that may be used as a solid-state electrolyte in solid-state batteries or as a material for surface coating. We conducted comprehensive characterization studies using solid-state nuclear magnetic resonance (SSNMR) spectroscopy, cryogenic transmission electron microscopy (cryo-TEM), matrix-assisted laser desorption ionization mass spectroscopy (MALDI-MS), X-ray diffraction spectroscopy (XRD), and X-ray photoelectron spectroscopy (XPS) to study the structure of this bulk LiPON material, which exhibits a composition closely resembling LiPO2N. We propose a reaction mechanism of this bulk synthesized LiPON in a solution system.
While LiPON has been successfully synthesized using atomic layer deposition (ALD) and sputtering methods, which produce high quality thin films for solid-state electrolytes and artificial solid electrolyte interphases (ASEIs),11–13 our group has been seeking an easy method for bulk LiPON synthesis that can be fast, low-cost techniques and more compatible with many electrochemical device fabrication processes. There have been very few reports on the fabrication of bulk LiPON or freestanding LiPON (FS-LiPON). López-Aranguren et al. fabricated crystalline LiPON via the ball milling method.2 Cheng et al. synthesized free-standing thin film LiPON through multiple steps using spin coating and sputtering methods.14 By enabling bulk LiPON synthesis, the fabrication of this solid-state electrolyte or coating layer can be greatly scaled up to different sizes and shapes to meet the demand of mass production in industry. In addition, solution-made LiPON may also work as a powder coating technique in the solution phase for solid-state electrolyte particles.
Here, our approach represents a new direction by simply mixing LiOtBu and DEPA, the two precursors used in ALD LiPON fabrication, in a solution environment.11,15 The ALD process deploys the two precursor vapors intermittently to react to form atomic layers of the LiPON thin film. We hypothesize that this reaction should also occur in solution. In addition, an ALD process typically requires that a substrate or powder that is to be coated be placed in a vacuum chamber, and the LiPON thin film is grown at 300 °C, both of which limit the materials that can be coated.16 Although it results in an extremely high-quality, conformal thin film, the ALD method makes it impractical for the layer to grow more than a few hundred nm thick.17,18 These quantity and technical challenges make synthesizing LiPON by a scalable, solution-based method particularly desirable. To date, there have been no reported instances of LiPON synthesis using solution-based methods or employing the specific precursors we have chosen for this study.19
In this paper, we present the synthesis and characterization of a bulk LiPON powder using comprehensive spectroscopic and electron microscopy techniques. From this characterization, we propose reaction mechanisms for solution-based LiPON synthesis reactions, which show that they are a series of oxidation reactions of the phosphazene base facilitated by LiOtBu. The electrochemical property of this solution-based LiPON was evaluated with electrochemical impedance spectroscopy (EIS). The precursors undergo polymerization reactions to form this bulk, free-standing, polymer LiPON with promising ionic conductivity that bodes well for its application in batteries.
Sputtering occurred in stages to assess when the surface layer had been passed. Sputtering time for each step was 1 min, 3 min, 3 min, respectively, and 7 min in total. The sputtering rate is approximately 3 nm min−1. The XPS spectra presented in the manuscript were all collected after 7 min of sputtering, thus with about 20 nm of the surface layer removed. XPS data were analyzed using the CasaXPS software, with quantification performed using peak areas normalized by standard photoionization cross sections corrected for our instrument geometry and a Shirley background for all high-resolution peaks. All spectra were calibrated to the C–C/C–H peak at 284.8 eV.
The polymerization mechanism occurs in several stages, as illustrated in Scheme 1. First, in the initiation phase, lithium tert-butoxide serves as a reducing agent that converts the DEPA monomer into its anionic form. During propagation, this activated anionic DEPA attacks another DEPA monomer through nucleophilic addition, extending the polymer chain and generating lithium ethoxide as a byproduct. The lithium ethoxide doesn't remain idle – it participates by reducing additional amine groups, facilitating further polymer growth. The process becomes cyclical, with both lithium ethoxide and the remaining lithium tert-butoxide continuously activating and incorporating unreacted DEPA monomers. This cycle persists until all lithium tert-butoxide is consumed, progressively building the linear LiPON polymer through alternating reduction and substitution steps.
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Scheme 1 Proposed mechanism of the reaction occurring between LiOtBu and DEPA in THF to form the as-prepared LiPON sample. |
Solid-state nuclear magnetic resonance (NMR) spectroscopy differs significantly from solution NMR in sample preparation and spectral characteristics. Unlike solution NMR, which uses deuterated solvents and produces sharp peaks from completely dissolved samples, solid-state NMR analyzes solid and semi-solid materials. This results in broader peaks due to anisotropic interactions that reflect the orientation-dependent properties of the sample.20 To overcome these challenges, solid-state NMR employs cross polarization (CP) with magic-angle spinning (MAS) techniques, which help obtain high-resolution spectra and extract detailed structural information about solid and semi-solid materials at the atomic level.21
In Fig. S1,† the 1H SSNMR spectra of LiPON and its two precursors, LiOtBu and DEPA, are presented. While the 1H SSNMR spectrum of solution-based LiPON exhibits less defined peaks (showing broad splitting patterns) compared to solution NMR, which is characteristic of solid-state samples,23 it shows qualitatively the ∼2:
3 ratio of protons from the –O–CH2–CH3 group. The 7Li SSNMR spectra (Fig. 2b) reveal contrasting lithium environments between the precursor and final product: (1) LiOtBu precursor (blue spectrum) shows a single (Li1) signal indicating one uniform lithium environment. (2) Solution-based LiPON (red spectrum) shows a broad, weak asymmetric split (Li1 and Li2), suggesting two distinct lithium environments, which is likely due to different resonance arrangements in the polymerized structure mechanism. 7Li also has a significant quadrupolar moment, which leads to broader signals and more complex splitting patterns, especially in asymmetric environments.24 While CP-MAS improves resolution, it cannot fully eliminate asymmetric splitting for 7Li. Additional analytical techniques, such as XPS, were considered for accurate analysis of complex lithium-containing systems.
The 15N SSNMR spectra (Fig. 2c) show different nitrogen environments between the precursor and product: (1) DEPA precursor (green spectrum) exhibits a single broad peak (N1) around 33 ppm, indicating one unique nitrogen environment. (2) Solution-based LiPON (red spectrum) shows symmetric peak splitting (N1) around 25–40 ppm, which differs from the 7Li solution-based LiPON NMR result. This symmetric splitting pattern can be attributed to strong quadrupolar interactions arising from the non-spherical charge distribution within the nitrogen nucleus. These interactions become particularly prominent when molecular motion in solution fails to completely average out the surrounding electric field gradient.25 The resulting spectrum displays symmetric, distributed peaks around the resonance frequency, with their positions dependent on the molecule's orientation within the magnetic field.
The 31P SSNMR spectra (Fig. 2d) reveal (1) the DEPA precursor (green spectrum) as a single clear phosphorus peak (P1) at ∼12 ppm. (2) Polymerized LiPON (red spectrum) shows asymmetric splitting (P1 and P2) between 17 and 30 ppm, which is very different from the 7Li LiPON pattern.2,26 This asymmetry can arise from several factors. First, during the Cross-Polarization (CP) process, magnetization may transfer unevenly to different 31P environments. Second, when using moderate Magic Angle Spinning (MAS) speeds, anisotropic interactions may not be fully averaged out, leading to asymmetric peak shapes and spinning sidebands. Third, in complex materials such as LiPON, multiple phosphorus environments can produce overlapping signals with distinct chemical shifts and anisotropies, creating an overall asymmetric appearance. Although 31P is not a quadrupolar nucleus, its coupling with nearby quadrupolar nuclei can affect the spectral features.27 Additionally, 31P can interact with neighboring nuclei (especially protons) through dipolar coupling. While CP-MAS techniques help reduce these dipolar interactions, incomplete averaging may contribute to the observed peak asymmetry.
The 13C solution-based LiPON spectra correlate with our proposed mechanism since we expect there are repeating ethoxy groups throughout the polymer chain. The movement of the Li cation throughout the proposed mechanism is due to resonance, as shown in Scheme 1 and evident in the 7Li NMR. Also, as suggested by the mechanism, the recurring presence of nitrogen throughout the polymer format can be seen in the resonance structure in our 15N spectra. Finally, the shifting of Li+ from O to N in the polymer can be seen to affect the resonance structure in the 31P solution-based LiPON spectra, creating an asymmetry in the split peak.
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Fig. 3 (a) XRD pattern, (b) TEM diffraction pattern and (c) high resolution TEM image of solution-based LiPON. |
Cryogenic transmission electron microscopy (cryo-TEM) diffraction patterns collected from the LiPON particles and aggregates were amorphous and are in good agreement with the XRD results. The position of the amorphous ring in the SAED image shown in Fig. 3b agrees with the broad amorphous hump in the XRD pattern shown in Fig. 3a. These results were consistent with previously reported XRD and electron diffraction patterns of thin-film LiPON in the literature.29 A small amount of crystalline intensity, originating from unwanted side reactions with water and ice from the freezing process, was identified in the electron diffraction data. There is only one identifiable diffraction ring in the pattern shown, corresponding to a d-spacing of ∼0.36 (±0.01) nm. We do observe a diffraction peak in the XRD at ∼25.5°, which is approximately the Bragg angle that corresponds to this d-spacing. This could suggest that the unidentified crystalline phases(s) measured during XRD are isolated impurities and that the intended LiPON product is near amorphous. Further study is required with less air exposure and perhaps a higher purity product.
Fig. 3c shows that the synthesis formed rod-like particle aggregates, with some individual particles visible on the carbon support film surface. The particles varied in size, ranging from the smallest at approximately 150 nm in length and 50 nm in width, to the largest exceeding one micron in length with widths of several hundred nanometers.
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Fig. 4 High-resolution XPS (a) C 1s, (b) Li 1s, (c) 1s, and (d) P 2p spectra of solution-made LiPON after 7 minutes of Ar+ sputtering. |
The C 1s spectrum shows that there is common adventitious carbon and C–O (from the glove box atmosphere) that is still present between powder grains even after sputtering. The quantified atomic percent of C is 21.90%. As evidenced by our NMR results and the XPS P 2p spectrum here, some of the C–O components can also be ascribed to a small amount of residual DEPA in the sample. Fig. 4b shows the Li 1s spectrum, which only displays one single Li+ peak.
As shown in the N 1s spectrum (Fig. 4c), the most prominent component has a binding energy (BE) of 399.14 eV, which corresponds to the PN–P structure of LiPON shown in Scheme 1, while the much smaller peak at 397.15 eV corresponds to the residual DEPA, which has a primary amine group connected to P.16 The quantification shows that this low BE peak is only 9.22 at% of the whole, so the amount of residual DEPA is small.
Fig. 4d shows the P 2p spectrum, where only one phosphorus species is identified, despite the N 1s spectrum confirming that there is a small amount of residual DEPA. This result could be due to the fact that the LiPON structure, or the repeating unit of LiPON that contains P, has an extremely similar structure to DEPA, where the only difference is the presence of a PN bond in LiPON and a P
O bond in DEPA. In both LiPON and DEPA molecular structures, P is at the center of a tetrahedron, with the vertices being 3 O and 1 N in LiPON and 2 O and 2 N in DEPA, respectively. Despite the electronegativity difference between N and O, with the valence electron of P being delocalized in this tetrahedral structure, the difference in the electron-withdrawing effect on P between the two structures may be very small. Considering the trace amount of DEPA leftover and the roughly 2 eV large full width at half maximum (FWHM) of the P peaks, it might not be enough to differentiate LiPON and DEPA peaks in the P 2p spectrum; thus, they show up as a broad enveloped peak as we observe. Overall, the XPS peak shapes and positions agree well with previous XPS studies of LiPON, including the ones using the same precursors.16
In addition, we conducted quantification of the atomic percent of each element, and we found that overall, the bulk LiPON has a formula of Li1.14PO2.55N0.58C1.49. Some components that contain C and O can be attributed to adventitious carbon and general surface contamination from the glove box. It is notable that the formula derived from XPS quantification does not perfectly align with the theoretical structure of LiPON, which should be LiPO2NC2H5 based on the proposed mechanism. This has also been the case in other synthesized bulk LiPON results.2,14 It is likely because the reactions to form LiPON are far less fine-tuned compared to chemical deposition or sputtering methods, which are controlled at the nanoscale. Nonetheless, our results show an almost clean composition of LiPON, which has a well-defined structure that reflects our NMR characterization results. These results showed the C–C bond from the ethyl group originally from DEPA and the C–O bond that is the ethyl group that is connected to the O in the PO2N2 tetrahedral structure in the polymer chain, which points towards possible refinement directions.
We conducted MALDI-MS analysis to examine the phenomenon wherein the mixture turned into a viscous white gel when the two precursor solutions were mixed together, which we suspected was a polymerization reaction, and the solution-made LiPON was in the form of a polymer. Fig. S4a† shows the MALDI-MS spectrum with an m/z range from 0.5 kDa to 10 kDa. It needs to be noted first that LiPON has very low solubility in most solvents, including THF; thus, the actual concentration of LiPON in the testing sample is expected to be far less than the 0.1 M that we intended based on the amount of LiPON we added to the THF solvent. The very weak signal above background can be seen in Fig. S4a.† Nonetheless, it still clearly shows molecular peaks (e.g. individual polymer chains) in the high molecular weight (m/z) region, confirming that solution-made LiPON is indeed a polymer, and the synthesis was a polymerization reaction. We also used MALDI-MS to analyze the two precursors LiOtBu and DEPA. As their results show in Fig. S4b and c,† neither showed any polymer peaks in the high m/z region resembling what we see in the solution LiPON spectrum. We did not conduct more detailed investigations of the gaps between the molecular peaks, mainly because MALDI sample preparation must be carried out under ambient conditions, which will inevitably expose the air-sensitive LiPON samples to moisture in the air as well as matrix chemical DCTB for more than 30 minutes at minimum. It has been studied that LiPON undergoes degradation when it reacts with water, which will render the repeating unit analysis inaccurate, if not impossible.30,31 In any case, the polymeric natured molecular peaks in the high m/z region are observed in the LiPON MALDI spectrum but not in DEPA or LiOtBu spectra.
We then measured the ionic conductivity of solution-made LiPON at 60.0 °C, and the EIS spectrum can be seen in Fig. 5. At 60.0 °C, we did not observe the same noisy conditions at lower frequency, and the spectrum is clean. We were able to fit this spectrum with our equivalent circuit model (Fig. S5 and Table S1†) and based on the deconvoluted impedance result, we were able to calculate the ionic conductivity of the solution-made LiPON as 1.92 × 10−6 S cm−1 at 60.0 °C, as it is in line with most of the reported results in the literature. Considering the novel fabrication method we employed (without a systematic study to optimize the synthesis process), this ionic conductivity value is very encouraging and bodes well for many potential applications of this solution-made LiPON in the field of batteries.
Footnote |
† Electronic supplementary information (ESI) available. See DOI: https://doi.org/10.1039/d5ta03196f |
This journal is © The Royal Society of Chemistry 2025 |