Yuqi
Huang
a,
Qian
Ma
b,
Ashton
Taylor
b,
Lucas
Lienard
c,
Theresa
Evans-Nguyen
b and
Venkat
Bhethanabotla
*a
aDepartment of Chemical, Biological, and Materials Engineering, University of South Florida, Tampa, FL 33620, USA. E-mail: bhethna@usf.edu
bDepartment of Chemistry, University of South Florida, Tampa, FL 33620, USA
cDepartment of Material Sciences, Polytech Dijon, Dijon, 21000, France
First published on 20th August 2025
Characterizing extracellular vesicles (EVs) using mass spectrometry (MS) provides several advantages. The molecular compositions within EVs can be analyzed at very low concentrations and can also distinguish lipids and molecules with similar structures. However, there are some challenges when analyzing EVs directly using MS, mainly due to their variations in size and biological composition, as well as their tendency to form large clusters. Here, we present a novel surface acoustic wave (SAW) sample preparation system capable of simultaneous disruption and nebulization of liposomes as a model for direct EV analysis by MS. This approach provides a mechanical alternative to traditional chemical methods, which minimizes sample preparation time, volume loss, and chemical interference while enhancing ionization efficiency. We study the influence of frequency on SAW nebulization for MS analysis of DOPC (1,2-dioleoyl-sn-glycero-3-phosphocholine) liposomes as well as liposome mixture. Through high-frequency Rayleigh SAW excitation, we demonstrate improved liposome disruption and enhanced ionization signals during MS analysis when combined with corona discharge ionization. We systematically investigate key parameters of device frequency, input radio frequency (RF) power, nebulization rate, acoustic heating, aerosolized droplet sizes, and surface preparation. The nebulization process was captured by high-speed imaging, which reveals the critical role of surface treatment and jetting dynamics in achieving efficient nebulization at different frequencies. Our findings reveal the frequency-dependent nature of Rayleigh SAW nebulization, highlighting its ability to generate fine, aerosolized particles that enhance MS sampling reliability and ionization efficiency. This work represents a significant advance in MS sample preparation techniques, with broad implications for lipidomics and growing interest in the analysis of biologically relevant vesicles such as EVs.
However, it is challenging to directly analyse lipids because the complex nature of lipid vesicles with polar and non-polar lipids requires different extraction and separation techniques.10,11 Additionally, disruption of liposome membranes is often necessary to ensure efficient ionization on encapsulated contents suitable for analysis.12,13 Traditional chemical methods, such as using organic solvents and detergents, can chemically alter vesicle cargo including sensitive biomolecules like proteins, potentially compromising analytical results.14,15 Another existing challenge is the presence of non-polar lipid composition, such as cholesterol, which can further complicate ionization using conventional MS techniques like electrospray ionization (ESI).16,17 ESI is vulnerable to fouling during the sampling of lipids.18 While matrix-assisted laser desorption ionization (MALDI) is another commonly used ionization technique, as is ESI, offers minimal sample preparation, but can suffer from matrix interference with low mass species such as cholesterol.18,19 Given these challenges, it is worthwhile to explore a novel, mechanical sampling approach that preserves the aqueous environment and minimizes interference for lipid and vesicle cargo analysis.
Surface acoustic wave (SAW)-based methods offer a promising solution by providing a mechanical approach to lyse biological vesicles and prepare samples for MS analysis through effective nebulization. SAW devices are capable of generating strong pressure gradients and induce acoustic streaming, which can result in appreciable shear stresses on cells, particularly under high-power operation and in the presence of standing wave field.20 Acoustic wave devices have a wide range of applications in various fields, including radio frequency filters, biosensors, chemical sensors, cell lysis, particle separation, and microfluidics.21–28 SAW waves are generated by applying an RF signal to interdigital transducers (IDTs), which convert electrical signals into mechanical waves via piezoelectricity. Among various types of SAW propagation modes, Rayleigh waves are confined near the surface of the piezoelectric substrate and its energy dissipates when encountering a liquid droplet, leading to fluidic streaming, acoustothermal heating, and liquid aerosolization.18,29
Among available piezoelectric materials for SAW excitations, lithium niobate (LiNbO3) and zinc oxide (ZnO) have been studied for fluid nebulization. ZnO is attractive for circuit integration due to its ease of sputtering onto various substrates.30 However, its use in high-frequency SAW nebulization requires significantly higher RF power than bulk LiNbO3, which can cause excessive jetting that hinders MS sampling.30–32 Additionally, ZnO's polycrystalline nature from sputtering deposition results in spurious wave generation that can reduce nebulization efficiency.32 In contrast, LiNbO3 offers superior performance with a higher electromechanical coupling coefficient and stable single crystal structure, which offers efficient energy transfer and better wave stability.30 These properties reduce acoustic losses, suppress spurious wave, and enhance nebulization consistency, making LiNbO3 the preferred material for high-frequency SAW-based MS sampling in this work.
A few previous studies have demonstrated the potential of SAW for MS sampling and, separately for biological vesicle lysis. For example, Goodlett et al. employed SAW nebulization to MS for the detection of lipids and peptides.18,33–35 We have previously demonstrated improved ionization efficiency for both polar and non-polar analytes by coupling SAW nebulization with atmospheric-pressure chemical ionization (APCI), where a high voltage (3 kV) is applied to the APCI needle to activate corona discharge (CD) ionization.36 In another previous publication, we presented the effect of SAW force magnitude in particle manipulation, showing that increasing SAW resonant frequency enhances the radiation pressure forces exerted on smaller particles.37 Building on these principles and findings, we also recently demonstrated that high-frequency SAWs (10–100 MHz) can mechanically disrupt liposomes without chemical lysing agents. Using a two-stage SAW platform, liposomes were lysed on a high-frequency chip and then transferred to a low-frequency SAW nebulization device. This approach allowed the detection of DOPC (1,2-dioleoyl-sn-glycero-3-phosphocholine) liposomes at low concentrations using MS analysis.23 Despite these advances, the two-chip platform presents several drawbacks, including sample volume loss, potential contamination, and lipid re-aggregation during transfer between devices with separate lysing and nebulization purposes.
To address these limitations, in this work, we develop and present a single-chip SAW platform capable of simultaneous liposome disruption and nebulization. This novel design simplifies the MS sampling process, minimizes sample loss, and enhances automation. In this study, we systematically designed and characterized SAW nebulizers operating at various resonant frequencies to evaluate their effects on liposome disruption, nebulization, and subsequent MS analysis. Parameters such as aerosolized droplet sizes, thermal effects, and nebulization speed were systematically evaluated to understand their frequency-dependent effects on signal intensity for MS analysis. The results demonstrate that this single-chip SAW platform significantly advances sample preparation techniques for lipidomics by providing a novel sampling method for analysing vesicles with improved reliability and ionization efficiency.
Frequency (MHz) | Wavelength (μm) | IDT aperture (mm) | Reflector aperture (mm) | Delay line length (mm) | Reflector # | Finger pair # |
---|---|---|---|---|---|---|
9.24 | 414 | 10 | 10.2 | 6.2 | 20 | 20 |
19.63 | 200 | 10 | 10.2 | 6.2 | 30 | 35 |
29.49 | 132 | 9.4 | 9.6 | 5.2 | 32 | 60 |
40.49 | 96 | 9.4 | 9.6 | 5.2 | 60 | 60 |
49.89 | 80 | 9.2 | 9.4 | 5 | 64 | 64 |
The fabrication of SAW devices starts with a cleaned 4 inch, double-side polished 128° YX-cut LiNbO3 substrate (University Wafer, Inc.). The thickness of the wafer chosen is 1 mm because thicker wafers withstand higher power and thermal-related stresses. The substrate was first cleaned with acetone, methanol, and DI-water, then dried with N2 and placed on an 80 °C hot plate to remove excessive moisture. A 2 μm layer of negative photoresist (NR9-1500py, Futerrex) was spin-coated onto the substrate. After pre-bake at 125 °C for 2 minutes, the photoresist is UV-exposed (Karl Suss MA-56) and followed by a post bake (2 min, 125 °C). The cured photoresist is then developed in resist developer RD6 (Futerrex) for 14 s. The thickness of the developed photoresist pattern was verified at multiple wafer locations using a stylus profiler (Dektak D150) to confirm consistent pattern formation and target thickness. Final pattern quality and completeness were also inspected using an optical microscope (Mitutoyo Corp). Metal deposition of a 10/100 Cr/Au layers using e-beam evaporation (AJA International Inc.) followed at a chamber pressure of 1 × 10−5 Torr. The SAW device is finished by using an acetone lift-off. In order to protect the IDT electrodes as well as the metal traces, the wafer is spin-coated with an 1.4 μm thick epoxy-based negative photoresist (SU-82002, Kayaku Advanced Materials) with similar pre-bake (1 min, 95 °C), UV-exposure, post-bake (2 min, 95 °C), resist development (SU-8 resist developer, Fisher Scientific), and thermal hard cure (10 min, 175 °C). To evaluate the acoustic impact of this SU-8 passivation layer, we measured the S21 response before and after coating. The insertion loss increased by ∼2.5–3.5 dB after SU-8 deposition (Fig. S5), indicating moderate acoustic attenuation due to the viscoelastic nature of the layer. The SU-8 thickness was minimized (∼1.4 μm) to reduce both damping and thermal effects, and it was not applied to the delay line to preserve wave–fluid interaction. For the measurements shown in Fig. 2, S21 data were collected using a newly fabricated set of devices mounted on a test fixture positioned directly below the MS, replicating the experimental setup. The test fixture includes a metal probe arm with an SMA-connected interface, and the measurement S-parameter files were de-embedded up to the tip of the arm to account for fixture loss. This approach ensured that the S21 response reflects the mounted device behaviour under actual operating conditions.
Similarly, A lipid mixture of 1,2-dioleoyl-sn-glycero-3-phosphocholine (DOPC) and 1,2-dioleoyl-sn-glycero-3-phosphoethanolamine (DOPE) was used to prepare vesicles with a 1:
1 molar ratio. A chloroform solution containing 1 mg mL−1 DOPC and 0.95 mg mL−1 DOPE (Avanti Polar Lipids) was evaporated to form a thin lipid film, which is then rehydrated with a 150 mM ammonium acetate solution prepared in LC/MS-grade water and agitated on a rotary evaporator for 3 hours. The resulting suspension was sonicated in a bath sonicator for 30 minutes to promote vesicle formation, and then extruded 11 times through 100 nm polycarbonate membranes (Whatman) to obtain uniform unilamellar liposomes (DLS verified size at 100 nm shown in Fig. S7). The final total lipid concentration was 50 μM (25 μM DOPC and 25 μM DOPE).
To further study and characterize the nebulization behaviour under different conditions, the nebulization process was recorded using a high-speed video camera (Phantom VEO640S) at a frame rate of 3000 frames per second. Water droplets with a volume of 1 μL were placed on 30 MHz SAW devices for high-speed camera imaging. One device was treated with oxygen plasma (Harrick Plasma) at 500 mTorr for 2 minutes to enhance surface wettability, while another 30 MHz device remained untreated. Droplet aerosol size distributions at different resonant frequencies were measured using an optical particle sizer (OPS 3330, TSI). Temperature changes during SAW nebulization were monitored using an infrared thermal camera (FLIR T420).
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Fig. 3 (a) Schematic diagram of SAW disruption and nebulization with APCI needle and MS; (b) SAW nebulization in action; (c) SAW nebulization with APCI needle for MS sampling. |
This quasi-steady liquid film is sometimes referred to acoustowetting and is crucial for nebulization to occur.42,43,45
Examples of nebulization behaviour from 1 μL droplets are captured via high-speed camera imaging Fig. 4 and 5. A 30 MHz device is operated at 7 watts on a delay line with and without oxygen plasma treatment (Fig. 4 and 5). When RF power is applied to the 30 MHz SAW device, Rayleigh waves propagate along the LiNbO3 substrate and couple into the droplet. From timepoints across both nebulization modalities, several stages can be clearly identified. Fig. 4 and 5 shows the formation of capillary wave and satellite droplet pinch-off on the droplet surface at the onset of SAW activation (within 5 ms). For the untreated 30 MHz device, the formation of large-jetted satellite droplets from the primary droplet are ejected vertically outside the capturing frame. The measurements of the jetted particles estimate diameters of about 400–700 microns. At higher frequencies, the capillary waves on the droplet's surface become more pronounced, and jetted volume from the primary droplet before nebulization has increased significantly. Overall, the oxygen plasma induced wettability dramatically improves SAW nebulization by anchoring the droplet and ensuring a uniform thin film, which minimize erratic jetting and produce a smooth continuous aerosol plume, ensuring consistent sample delivery into the MS.
During MS sampling, occasionally, undesirable sample traveling is associated with the coupled-resonator design of the SAW devices, primarily due to the slight resonance variations attributable to the fabrication process. Such differences can cause the input frequency (measured from the S21 parameter) to align more closely with one port than the other, leading to an imbalance in the amplitude of the standing wave forces. The minimum input RF power to initiate nebulization, as well as the maximum droplet volumes associated with those input powers for every device frequency is presented in Table 2. Note that all devices were oxygen plasma treated.
Device frequency (MHz) | Minimum power (Watt, estimated) | Maximum sample allowed (μL) |
---|---|---|
10 | 2 | >5 |
20 | 3 | >5 |
30 | 5 | ∼1 |
40 | 7 | 0.5 |
50 | 13.97 | 0.3 |
The averaged nebulization rate versus input RF power is presented in Fig. 6. The rate is calculated from the ratio of nebulized droplet volume to the time taken for sample to disappear completely. The added volume droplets for 10 to 50 MHz devices are 5 μL, 5 μL, 0.5 μL, 0.5 μL, 0.3 μL. It is observed that the nebulization rate is increased with larger input RF power, as well as decreased droplet volume. This observation is consistent with the ZnO/Si SAW nebulization device reported by Guo et al.32 We found that maintaining a steady, moderately low nebulization rate during MS sampling can minimize sample loss caused by the limited suction capacity of the ion transfer tube. Additionally, it improves ionization efficiency by preventing excessive moisture accumulation on the corona discharge needle, thereby enhancing the consistency and reliability of the results.
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Fig. 7 Mean droplet diameter as a function of SAW excitation frequency. Blue data points represent measurements from the particle sizer. Red points indicate literature-reported values from Kurosawa et al. (1996)44 at 10 MHz and Collins et al. (2012)45 at 22 MHz. The observed inverse relationship between frequency and droplet size is consistent with capillary wave scaling theory, supporting the use of higher-frequency SAWs for generating smaller droplets in nebulization applications. |
This trend is consistent with the physical model proposed by Collins et al.,45 in which atomization from SAW-induced thin films is governed by acoustic streaming and radiation pressure that modify the film's geometry. Specifically, SAWs diffract into the liquid at the Rayleigh angle, generating both acoustic radiation pressure and boundary-layer streaming flows that redistribute fluid into a thin, quasi-steady film. The geometry of this film is characterized by its height H and length L, which can determine the dominant instability wavelength λ that sets the droplet diameter. Experiments revealed that diameter scales inversely with operating frequency under a balance of capillary and viscous stresses. Thus, the observed decrease in droplet size with increasing SAW frequency is attributed to shorter acoustic wavelengths, which lead to thinner and shorter films and in result of finer droplets. Notably, this mechanism is facilitated by O2 plasma treatment of the substrate, which reduces the contact angle and promotes enhanced wettability. A more wettable surface allows for the formation of thinner, more stable films with larger lateral spread, improving the coupling of acoustic energy into the fluid and suppressing premature jetting or dewetting. This results in a more uniform atomization front and supports efficient breakup into smaller droplets.
In addition to the observed frequency-dependent trends, recent studies suggest that classical capillary wave models alone are insufficient to fully explain the mechanisms of SAW-driven nebulization.46 While Kelvin's equation can predict a scaling relationship between frequency and droplet size via capillary wave breakup, emerging experimental and theoretical insights reveal that multiple droplet generation mechanisms act in parallel within a SAWN system. Research shows that SAW nebulization involves multiple droplet-generation mechanisms acting simultaneously. Jetting and whipping phenomena arise when high local acoustic pressures deform the liquid into crests or ridges, which then pinch off into larger, irregular droplets,47 which agrees with the observation from the high-speed camera in this work. At higher acoustic intensities or with thicker films, cavitation becomes significant and leads to vapor bubbles formation and collapse, which launches high-velocity micro-jets that eject smaller droplets.46,48 In parallel, large oscillating liquid domes or films may fragment due to instability and produce both fine and coarse droplets, resulting in multimodal droplet size distributions.49,50
While SAW devices are widely used in biosensing and biological sample manipulation, one needs to take extra precautions when working with temperature-sensitive biomolecules. Excessive or unstable heating during SAW operations may cause analyte degradation, leading to compromised data consistency and reliability. Therefore, maintaining an optimized thermal range is important to preserve sample integrity and ensure accurate results. To study the acoustic heating effect from SAW, we measured the surface temperature of a 0.5 μL water droplet on the delay line using an infrared camera. The recorded duration of nebulization is controlled within 3 seconds to match the actual MS sampling time, and the maximum temperature of the droplet sampling region was recorded at different SAW nebulization frequencies and RF powers, with results shown in Fig. 8. Across all frequencies, the average temperature rises as excitation power increases. This thermal effect is amplified at higher frequency, for example, at 8 W, 40 MHz shows a much higher temperature increase compared to 10 MHz. This enhanced thermal response may be attributed to more efficient energy transfer at elevated excitation powers and frequencies. We note that both the LiNbO3 substrate and water droplets used in our measurements are non-blackbody emitters which may introduce some underestimation in absolute temperature values. To account for this, all measurements were performed under consistent viewing angles and environmental conditions, and the results are interpreted primarily in a relative manner to compare thermal trends across frequencies and power levels. The goal of this analysis is not to report exact surface temperatures, but to illustrate the relative magnitude of acoustothermal heating and its correlation with SAW frequency and input power.
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Fig. 8 Maximum temperature of droplet nebulization at different input powers and nebulization frequencies. |
It is worth noting that under high RF power, the LiNbO3 substrate can be subjected to breaking due to several intrinsic material responses, including mechanical deformation when exposed to electric fields, as well as sharp thermal gradients and resulting in stress from uneven expansion. Thermal failure is also a major factor to wafer breakage during device fabrication, where the temperature needs to be slowly increased with an anti-static blower to keep removing static charges built up during heating. Developing a robust device capable of withstanding high power while minimizing heat transfer to the sample requires careful consideration of multiple design factors and system configurations. Several strategies can be considered to enhance device durability, including using a thicker substrate, incorporating a metallic holder with an integrated heat sink, cooling the device with a Peltier cooler, configuring the RF generator to operate at a reduced duty cycle, as well as optimizing the metal trace and SAW design on the substrate to enhance energy efficiency and SAW stability. These modifications can all be considered to contribute to improving thermal management and device ruggedness under high-power conditions.
Fig. 9 presents representative mass spectra collected from 10 MHz to 50 MHz. Across all conditions, several primary peaks were consistently observed, including the phosphocholine fragment [PC]+ at 184.1 m/z, the protonated DOPC monomer [DOPC + H]+ at 786.5 m/z, and the DOPC dimer [2DOPC + H]+ at 1571.8 m/z. Additional low-abundance adduct ions were detected, including oxygen adducts (e.g., +O to +6O) from 802.5 to 882.5 m/z and sodium adducts at 808.5 m/z.
Fig. 10 shows the extracted ion chromatogram (EIC) results, calculated as the summed peak areas of the DOPC monomer and dimer across the entire signal duration (<3 s). Notably, the highest ion signal was observed at 30 MHz (∼3.7 × 106), followed by 40 MHz (∼1.93 × 106) and 50 MHz (∼1.47 × 106). These were significantly higher than signals obtained at 10 MHz (∼4.1 × 105) and 20 MHz (∼5.75 × 105). To evaluate whether this enhancement resulted from temperature alone, we conducted a control test at 10 MHz after preheating the DOPC sample in a 60 °C water bath for 3 minutes. This condition produced a reduced signal (∼5.87 × 104), indicating that heating alone can reduce ionization efficiency. These findings suggest that the improved ion signals at higher frequencies stem primarily from enhanced SAW-driven vesicle disruption and finer droplet atomization, rather than temperature effects. Higher frequencies generate smaller aerosol droplets with greater surface-to-volume ratios, promoting more efficient ionization by the APCI needle.
In contrast, the 10 MHz trials showed considerable variability. Usable DOPC signals were recovered in fewer than half of the repeated trials, while the remaining attempts yielded no detectable ion peaks. In one instance, operation at 10 MHz triggered a vacuum level error from the MS turbo pump, necessitating equipment cleaning and recalibration. This performance inconsistency is likely due to insufficient vesicle disruption and the formation of larger aerosol droplets, which are less efficiently ionized and may clog the MS inlet. Larger droplets at low frequencies can also accumulate on the APCI needle, leading to short circuits and diminished ionization efficiency. No such signal dropout or equipment issues were observed in the 30–50 MHz trials, all of which consistently produced DOPC ion peaks over five consecutive runs. The improved reproducibility and signal strength at these higher frequencies underscore the value of frequency-optimized SAW nebulization.
For general application, it is critical to calibrate droplet volume for each frequency to avoid sample jetting, especially at high power levels. Variations in solvent viscosity, density, and contact angle can lead to satellite droplet formation, which may contaminate the APCI needle or ion transfer tube. Such fouling can short-circuit the needle or cause clogging, increasing background noise and requiring frequent maintenance. These complications were most apparent in the 10 MHz and 20 MHz groups and were largely absent in the higher-frequency devices.
Extracted ion chromatogram (EIC) data from 10 MHz and 50 MHz nebulization are summarized in Fig. 11(c). The 50 MHz device achieved an average total EIC peak area of 5.65 × 106 compared to 1.60 × 106 for 10 MHz. These findings support the frequency-dependent enhancement of ionization efficiency and extending the utility of the SAW nebulization platform to mixed-lipid vesicles and reinforcing its relevance for analysing biologically representative systems such as extracellular vesicles.
These results highlight the potential of high-frequency SAW devices as an effective and innovative alternative to conventional MS sampling techniques. The single-chip SAW platform offers a simplified and streamlined workflow, reducing the required sample volume and preparation time while enhancing assay sensitivity. Furthermore, this study underscores the importance of optimizing the system by considering factors such as autothermal effects, device robustness, sampling volume, aerosolized particle size distribution, and nebulization rate to maximize performance. The studies demonstrate the potential of SAW devices as a promising tool for advancing lipidomics and biological vesicle analysis in biomedical research. Future work will expand on this foundation by exploring the application of SAW devices to EVs such as exosomes, lipid aggregates, and lipid–protein complexes, further broadening the scope and impact of this innovative platform.
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