Jump to main content
Jump to site search

Issue 40, 2016
Previous Article Next Article

High-mobility p-type NiOx thin-film transistors processed at low temperatures with Al2O3 high-k dielectric

Author affiliations

Abstract

Although there are a few research studies on solution-processed p-channel oxide thin-film transistors (TFTs), the strict fabrication conditions and the poor electrical properties have limited their applications in low-power complementary metal oxide semiconductor (CMOS) electronics. Here, the application of the polyol reduction method for processing p-type CuxO and NiOx channel layers and their implementation in TFT devices are reported. The optimized CuxO and NiOx TFTs were achieved at low annealing temperatures (∼300 °C) and exhibited decent electrical properties. Encouraged by the inspiring results obtained on SiO2/Si substrates, the TFT performance was further optimized by device engineering, employing high-k AlOx as the gate dielectric. The fully solution-processed NiOx/AlOx TFT could be operated at a low voltage of 3.5 V and exhibits a high hole mobility of around 25 cm2 V−1 s−1. Our work demonstrates the ability to grow high-quality p-type oxide films and devices via the polyol reduction method over large area substrates while at the same time it provides guidelines for further p-type oxide material and device improvements.

Graphical abstract: High-mobility p-type NiOx thin-film transistors processed at low temperatures with Al2O3 high-k dielectric

Back to tab navigation

Supplementary files

Publication details

The article was received on 24 May 2016, accepted on 05 Sep 2016 and first published on 06 Sep 2016


Article type: Paper
DOI: 10.1039/C6TC02137A
J. Mater. Chem. C, 2016,4, 9438-9444

  •   Request permissions

    High-mobility p-type NiOx thin-film transistors processed at low temperatures with Al2O3 high-k dielectric

    F. Shan, A. Liu, H. Zhu, W. Kong, J. Liu, B. Shin, E. Fortunato, R. Martins and G. Liu, J. Mater. Chem. C, 2016, 4, 9438
    DOI: 10.1039/C6TC02137A

Search articles by author

Spotlight

Advertisements