Jump to main content
Jump to site search

Issue 47, 2015
Previous Article Next Article

Layered nano-gratings by electron beam writing to form 3-level diffractive optical elements for 3D phase-offset holographic lithography

Author affiliations

Abstract

A multi-level nanophotonic structure is a major goal in providing advanced optical functionalities as found in photonic crystals and metamaterials. A three-level nano-grating phase mask has been fabricated in an electron-beam resist (ma-N) to meet the requirement of holographic generation of a diamond-like 3D nanostructure in photoresist by a single exposure step. A 2D mask with 600 nm periodicity is presented for generating first order diffracted beams with a preferred π/2 phase shift on the X- and Y-axes and with sufficient 1st order diffraction efficiency of 3.5% at 800 nm wavelength for creating a 3D periodic nanostructure in SU-8 photoresist. The resulting 3D structure is anticipated to provide an 8% complete photonic band gap (PBG) upon silicon inversion. A thin SiO2 layer was used to isolate the grating layers and multiple spin-coating steps served to planarize the final resist layer. A reversible soft coating (aquaSAVE) was introduced to enable SEM inspection and verification of each insulating grating layer. This e-beam lithographic method is extensible to assembling multiple layers of a nanophotonic structure.

Graphical abstract: Layered nano-gratings by electron beam writing to form 3-level diffractive optical elements for 3D phase-offset holographic lithography

Back to tab navigation

Publication details

The article was received on 02 Oct 2015, accepted on 31 Oct 2015 and first published on 02 Nov 2015


Article type: Communication
DOI: 10.1039/C5NR06822C
Author version
available:
Download author version (PDF)
Nanoscale, 2015,7, 19905-19913

  •   Request permissions

    Layered nano-gratings by electron beam writing to form 3-level diffractive optical elements for 3D phase-offset holographic lithography

    L. (. Yuan and P. R. Herman, Nanoscale, 2015, 7, 19905
    DOI: 10.1039/C5NR06822C

Search articles by author

Spotlight

Advertisements