Jump to main content
Jump to site search

Issue 7, 2018
Previous Article Next Article

Synthesis and characterization of heteroleptic titanium MOCVD precursors for TiO2 thin films

Author affiliations

Abstract

Heteroleptic titanium alkoxides with three different ligands, i.e., [Ti(OiPr)(X)(Y)] (X = tridentate, Y = bidentate ligands), were synthesized to find efficient metal organic chemical vapor deposition (MOCVD) precursors for TiO2 thin films. Acetylacetone (acacH) or 2,2,6,6-tetramethyl-3,5-heptanedione (thdH) was employed as a bidentate ligand, while N-methyldiethanolamine (MDEA) was employed as a tridentate ligand. It was expected that the oxygen and moisture susceptibility of titanium alkoxides, as well as their tendency to form oligomers, would be greatly reduced by placing multidentate and bulky ligands around the center Ti atom. The synthesized heteroleptic titanium alkoxides were characterized both physicochemically and crystallographically, and their thermal behaviors were also investigated. [Ti(OiPr)(MDEA)(thd)] was found to be monomeric and stable against moisture; it also showed good volatility in the temperature window between volatilization and decomposition. This material was used as a single-source precursor during MOCVD to generate TiO2 thin films on silicon wafers. The high thermal stability of [Ti(OiPr)(MDEA)(thd)] enabled the fabrication of TiO2 films over a wide temperature range, with steady growth rates between 500 and 800 °C.

Graphical abstract: Synthesis and characterization of heteroleptic titanium MOCVD precursors for TiO2 thin films

Back to tab navigation

Supplementary files

Publication details

The article was received on 27 Dec 2017, accepted on 14 Jan 2018 and first published on 15 Jan 2018


Article type: Paper
DOI: 10.1039/C7DT04894G
Citation: Dalton Trans., 2018,47, 2415-2421
  •   Request permissions

    Synthesis and characterization of heteroleptic titanium MOCVD precursors for TiO2 thin films

    E. H. Kim, M. H. Lim, M. S. Lah and S. M. Koo, Dalton Trans., 2018, 47, 2415
    DOI: 10.1039/C7DT04894G

Search articles by author

Spotlight

Advertisements