Issue 13, 2002
From the journal:

Journal of the Chemical Society, Dalton Transactions

Single-source CVD routes to titanium phosphide

Christopher S. Blackman,a   Claire J. Carmalt,*a   Ivan P. Parkin,a   Leonardo Apostolico,b   Kieran C. Molloy,b   Andrew J. P. Whitec  and  David J. Williamsc  

* Corresponding authors

a Department of Chemistry, Christopher Ingold Laboratories, University College London, 20 Gordon Street, UK
E-mail: c.j.carmalt@ucl.ac.uk

b Department of Chemistry, University of Bath, Claverton Down, UK

c Department of Chemistry, Imperial College of Science, Technology and Medicine, South Kensington, UK

Abstract

Treatment of TiCl4 with two equivalents of L (L = PhPH2, Ph2PH, PPh3, CyPH2, Cy2PH, PCy3) resulted in the formation of [TiCl4(L)2]. Reaction of TiCl4 with a stoichiometric amount of 1,2-bis(diphenylphosphino)methane (dppm), 1,2-bis(diphenylphosphino)ethane (dppe) and 1,2-bis(diphenylphosphino)propane (dppp) affords [TiCl4(dppm)], [TiCl4(dppe)] and [TiCl4(dppp)], respectively. X-Ray crystal structures of [TiCl4(Cy2PH)2] (5) and [TiCl4(dppe)] (9) have been determined. Low pressure chemical vapour deposition (LPCVD) studies of all the compounds revealed that [TiCl4(L)2] (L = CyPH2, Cy2PH and PCy3) and [TiCl4(dppm)] can form titanium phosphide thin-films on glass.

Graphical abstract: Single-source CVD routes to titanium phosphide

About
Cited by
Related
Download options Please wait...

Supplementary files

Article information

DOI
https://doi.org/10.1039/B203613B
Article type
Paper
Submitted
12 Apr 2002
Accepted
07 May 2002
First published
28 May 2002

J. Chem. Soc., Dalton Trans., 2002, 2702-2709

Permissions

Request permissions

Single-source CVD routes to titanium phosphide

C. S. Blackman, C. J. Carmalt, I. P. Parkin, L. Apostolico, K. C. Molloy, A. J. P. White and D. J. Williams, J. Chem. Soc., Dalton Trans., 2002, 2702 DOI: 10.1039/B203613B

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Spotlight

Advertisements