Single source molecular precursors for the deposition of III/VI chalcogenide semiconductors by MOCVD and related techniques

Abstract

There has been a renaissance of interest in Group III/VI (13/16) semiconductor materials because of their potential for use in various electronics applications. The synthesis and characterization of metalorganic and organometallic compounds with Group 16 ligands have as a consequence become topical. Such molecules are used as precursors and contain direct bonds between the metal and the chalcogen. A close interplay between the development of new chemistry and the deposition of novel materials has therefore developed.