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Issue 6, 1999

The chemistry of volatile waste from silicon wafer processing

Abstract

The semiconductor industry uses extremely pure gases and vapours to produce solid-state devices based on silicon wafers of great chemical and physical sophistication under very clean conditions. However, the waste volatiles from the processes pose a serious environmental threat. This article attempts to show how an increasing armoury of chemical methods is being applied to abate any pollution and to highlight areas where ideal solutions to problems have yet to be found.

Article information


J. Chem. Soc., Dalton Trans., 1999, 815-822
Article type
Paper

The chemistry of volatile waste from silicon wafer processing

P. L. Timms, J. Chem. Soc., Dalton Trans., 1999, 815 DOI: 10.1039/A806743K

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