a
HSG-IMIT - Institut für Mikro- und Informationstechnik, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
E-mail: daniel.mark@hsg-imit.de
b
Laboratory for MEMS Applications, IMTEK - Department of Microsystems Engineering, University of Freiburg, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
c
BIOSS – Centre for Biological Signalling Studies, University of Freiburg, 79110 Freiburg, Germany