Issue 32, 2021

Towards an ideal high-κ HfO2–ZrO2-based dielectric

Abstract

The existence of a morphotropic phase boundary (MPB) inside HfO2–ZrO2 solid solution thin films has been predicted; if it exists, it provides a new path toward an ideal silicon-compatible dielectric. Herein, we investigate the structural evolution along with the dielectric and ferroelectric behaviors of differently designed HfO2–ZrO2 thin films to engineer the density of the MPB inside the film structure and consequently, enhance the dielectric properties. Polarization vs. electric field (PE) measurements of Hf0.25Zr0.75O2 thin films reveal ferroelectric (FE)–antiferroelectric (AFE) characteristics. For this composition, the dielectric constant εr is higher than those of FE Hf0.5Zr0.5O2 and AFE ZrO2 thin films; the difference is attributed to the formation of the MPB. To increase the density of the MPB and subsequently the dielectric properties, 10 nm Hf0.5Zr0.5O2 (FE)/ZrO2 (AFE) nanolaminates were prepared with different lamina thicknesses tL. The coexistence of FE and AFE properties was confirmed by structural characterization studies and PE measurements. The thinnest layered nanolaminate (tL = 6 Å) showed the strongest dielectric constant εr ∼ 60 under a small signal ac electric field of ∼50 kV cm−1; this is the highest εr so far observed in HfO2–ZrO2 thin films. This behavior was attributed to the formation of an MPB near FE/AFE interfaces. The new design provides a promising approach to achieve an ideal high-κ CMOS-compatible device for the current electronic industry.

Graphical abstract: Towards an ideal high-κ HfO2–ZrO2-based dielectric

Article information

Article type
Paper
Submitted
12 4月 2021
Accepted
25 6月 2021
First published
25 6月 2021

Nanoscale, 2021,13, 13631-13640

Towards an ideal high-κ HfO2–ZrO2-based dielectric

A. Kashir, M. Ghiasabadi Farahani and H. Hwang, Nanoscale, 2021, 13, 13631 DOI: 10.1039/D1NR02272E

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