Issue 2, 2017

Transferrable single crystalline 4H-SiC nanomembranes

Abstract

In this work, we demonstrate a transferrable single crystalline 4H-SiC nanomembrane (SiC NM) released from a SiC-on-insulator (SiCOI) wafer. High resolution X-ray diffraction (XRD) and atomic force microscopy (AFM) were performed on the SiC NM and confirmed similarly good crystallinity and surface morphology. In addition, the refractive index and extinction coefficient of the SiC NM were investigated using ellipsometry analyses. Despite its thinness (i.e., 200 nm), the SiC NM achieved an absorption greater than 40% in the wavelength range of 200–260 nm with a maximum absorption of 73.8% at 256 nm. Our transferrable SiC NM provides not only good mechanical flexibility, but also exhibits excellent ultraviolet (UV) light absorption which could be readily utilized for high sensitivity flexible UV detectors.

Graphical abstract: Transferrable single crystalline 4H-SiC nanomembranes

Associated articles

Supplementary files

Article information

Article type
Paper
Submitted
16 十月 2016
Accepted
26 十一月 2016
First published
26 十一月 2016

J. Mater. Chem. C, 2017,5, 264-268

Transferrable single crystalline 4H-SiC nanomembranes

M. Kim, J. Seo, D. Zhao, S. Liu, K. Kim, K. Lim, W. Zhou, E. Waks and Z. Ma, J. Mater. Chem. C, 2017, 5, 264 DOI: 10.1039/C6TC04480H

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