Issue 5, 2023

Nanoscale compositional segregation in epitaxial AlScN on Si (111)

Abstract

We report the growth of epitaxial wurtzite AlScN thin films on Si (111) substrates with a wide range of Sc concentrations using ultra-high vacuum reactive sputtering. Sc alloying in AlN enhances piezoelectricity and induces ferroelectricity, and epitaxial thin films facilitate systematic structure-based investigations of this important and emerging class of materials. Two main effects are observed as a function of increasing Sc concentration. First, increasing crystalline disorder is observed together with a structural transition from wurtzite to rocksalt at ∼30 at% Sc. Second, nanoscale compositional segregation consistent with spinodal decomposition occurs at intermediate compositions, before the wurtzite to rocksalt phase boundary is reached. Lamellar features arising from composition fluctuations are correlated with polarization domains in AlScN, suggesting that composition segregation can influence ferroelectric properties. The present results provide a route to the creation of single crystal AlScN films on Si (111), as well as a means for self-assembled composition modulation.

Graphical abstract: Nanoscale compositional segregation in epitaxial AlScN on Si (111)

Article information

Article type
Communication
Submitted
06 டிசம்பர் 2022
Accepted
06 மார்ச் 2023
First published
06 மார்ச் 2023

Nanoscale Horiz., 2023,8, 674-684

Author version available

Nanoscale compositional segregation in epitaxial AlScN on Si (111)

X. Zhang, E. A. Stach, W. J. Meng and A. C. Meng, Nanoscale Horiz., 2023, 8, 674 DOI: 10.1039/D2NH00567K

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements