DFT mechanistic insights into the atomic layer deposition of β-Ga2O3

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RSC Adv., 2025, 15, 38260
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Thermal atomic layer deposition of Ga2O3 films using trimethylgallium and H2O

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Journal of Crystal Growth, 2025, 650, 127974
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Different growth modes of Si doped Ga2O3 films on sapphire substrates via atomic layer deposition

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Journal of Alloys and Compounds, 2026, 1050, 185863
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Influence of Finely Tuning Power and Oxygen Flux Ratio on Optoelectronic Properties of Sputtered Amorphous Gallium Oxide Thin Films

Xiao Song, Zixiao Yan, Anming Mo, Mingxin Hu, Yanjun Duan, Zhiqiang Li and Yingnan Guo

ECS J. Solid State Sci. Technol., 2025, 14, 097002
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Influence of particle size distribution on dielectric, electrical, and microstructural properties of aerosol-deposited Ga2O3 film for advanced electronic device

Jun-Woo Lee, Jong Ho Won, Dong-Gyu Choi, Jwa-Bin Jeon, Sunghoon Kim, Chulhwan Park, Weon Ho Shin, Kanghee Won, Sang-Mo Koo and Jong-Min Oh

Ceramics International, 2024, 50, 14067
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Nature of GaOx Shells Grown on Silica by Atomic Layer Deposition

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Chem. Mater., 2023, 35, 7475
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Improved Ga2O3 films on variously oriented Si substrates with Al2O3 or HfO2 buffer layer via atomic layer deposition

Xiangtai Liu, Jiayang Wang, Zhitian Xu, Shaoqing Wang, Yifan Jia, Qin Lu, Zhan Wang, Yunhe Guan, Lijun Li and Haifeng Chen

Micro and Nanostructures, 2024, 193, 207925
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Low temperature growth of single-phase and preferentially oriented ɛ-Ga2O3 films on sapphire substrates via atomic layer deposition

Xiangtai Liu, Jiayang Wang, Lu Jin, Jiao Fu, Qin Lu, Shaoqing Wang, Yifan Jia, Zhan Wang, Yunhe Guan and Haifeng Chen

Journal of Vacuum Science & Technology A, 2025, 43
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Structural and Electrically Conductive Properties of Plasma-Enhanced Chemical-Vapor-Deposited High-Resistivity Zn-Doped β-Ga2O3 Thin Films

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Micromachines, 2025, 16, 954
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Low-temperature growth and characterization of β-Ga2O3 thin films by ECR-PEMOCVD

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Materials Science in Semiconductor Processing, 2025, 194, 109588
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Rare earth element applications in Ga2O3: Luminescence and scintillation

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Applied Physics Reviews, 2025, 12
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Enhancement-mode Ga2O3 FETs with an unintentionally doped (001) β-Ga2O3 channel layer grown by metal-organic chemical vapor deposition

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Atomic Layer Deposition of Ga2O3 from GaI3 and O3: Growth of High-Density Phases

Lauri Aarik, Hugo Mändar, Jekaterina Kozlova, Aivar Tarre and Jaan Aarik

Crystal Growth & Design, 2023, 23, 5899
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Plasmonically enhanced solar-blind self-powered photodetector array utilizing Pt nanoparticles-modified Ga2O3 nanorod heterojunction

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Photon. Res., 2025, 13, 140
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Electrophoretic Deposition of Conformal β-Ga2O3 Films on Arbitrary Substrates for Heterojunction-Based Deep-Ultraviolet Photodetectors

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ACS Appl. Opt. Mater., 2024, 2, 1580
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Photodeposited Amorphous WO3 Thin-Film Conductive Filters for Heterojunction Near-Ultraviolet Spectrally Selective Photodetection and Imaging

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ACS Photonics, 2025, 12, 1075
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Growth of Zn–N Co-Doped Ga2O3 Films by a New Scheme with Enhanced Optical Properties

Daogui Liao, Yijun Zhang, Ruikang Wang, Tianyi Yan, Chao Li, He Tian, Hong Wang, Zuo-Guang Ye, Wei Ren and Gang Niu

Nanomaterials, 2025, 15, 1020
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Interfacial Properties of the SnO/κ-Ga2O3 p-n Heterojunction: A Case of Subsurface Doping Density Reduction via Thermal Treatment in κ-Ga2O3

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ACS Appl. Mater. Interfaces, 2023, 15, 45997
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Ultrahigh Breakdown Field in Gallium (III) Oxide Dielectric Structure Fabricated by Novel Aerosol Deposition Method

Jun‐Woo Lee, Jong Ho Won, Woosup Kim, Jwa‐Bin Jeon, Myung‐Yeon Cho, Sunghoon Kim, Minkyung Kim, Chulhwan Park, Weon Ho Shin, Kanghee Won, Sang‐Mo Koo and Jong‐Min Oh

Small Structures, 2024, 5
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Microstructure and optical properties of β-Ga2O3 thin films fabricated by pulsed laser deposition

Yiwen Wu, Xuexi Yan, Yixiao Jiang, Tingting Yao, Chunlin Chen and Hengqiang Ye

Thin Solid Films, 2024, 796, 140336
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Interpretable Surrogate Learning for Electronic Material Generation

Zhilong Wang, Sixian Liu, Kehao Tao, An Chen, Hongxiao Duan, Yanqiang Han, Fengqi You, Gang Liu and Jinjin Li

ACS Nano, 2024, 18, 33587
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