Issue 41, 2021

A minireview on chemical vapor deposition growth of wafer-scale monolayer h-BN single crystals

Abstract

Hexagonal boron nitride (h-BN), with its excellent stability, flat surface, and large bandgap, plays a role in a variety of fundamental science and technology fields. The past few years have witnessed significant development in the scaled growth of h-BN single crystals. Currently, the size of h-BN crystal can be reached up to wafer-scale, paving the way towards industrial production and commercial applications. In this minireview, recent academic breakthroughs regarding the controlled growth of large-sized h-BN single crystals via chemical vapor deposition (CVD) are presented. The as-developed technique in terms of growth parameters, choice of catalysts, and the mechanism is fully emphasized, offering a guideline in enhancing the size and quality of h-BN. Several typical metal catalysts have been used in shaping scaled h-BN single crystals, of which the metal Cu substrate has drawn the most intensive attention. The significant advances in expanding the size of h-BN single crystals will largely push forward the way to h-BN industrialization and commercialization. The past few years have witnessed significant development in the scaled growth of h-BN single crystals. Currently, the size of h-BN crystal can be reached up to wafer-scale, paving the way towards industrial production and commercial applications. In this minireview, recent academic breakthroughs regarding controlled growth of large-sized h-BN single crystals via chemical vapor deposition (CVD) are present. The as-developed technique in terms of growth parameters, choice of catalysts and mechanism is fully emphasized, offering a guideline in enhancing size and quality of h-BN. Several typical metal catalysts are exhibited in shaping scaled h-BN single crystals, of which the metal Cu substrate has drawn the most intensive attentions.

Graphical abstract: A minireview on chemical vapor deposition growth of wafer-scale monolayer h-BN single crystals

Article information

Article type
Minireview
Submitted
22 jun 2021
Accepted
21 ago 2021
First published
27 set 2021

Nanoscale, 2021,13, 17310-17317

A minireview on chemical vapor deposition growth of wafer-scale monolayer h-BN single crystals

L. Li, Y. Zhang, R. Zhang, Z. Han, H. Dong, G. Yu, D. Geng and H. Y. Yang, Nanoscale, 2021, 13, 17310 DOI: 10.1039/D1NR04034K

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