Issue 10, 2021

Interplay between oxygen defects and dopants: effect on structure and performance of HfO2-based ferroelectrics

Abstract

Ten years after the first report on ferroelectricity in HfO2, researchers are still occupied unraveling the different causes behind this phenomenon. Among them, oxygen related defects seem to play a major role, affecting both crystalline phase formation and performance of HfO2-based devices. This review surveys the available literature and provides a broad picture on the topic, starting with an overview of existing oxygen-related defects, assessing the extensive calculations and experimental reports on phase stabilization in both undoped and doped HfO2 and concluding with a discussion of device reliability involving oxygen vacancies, first in more classical HfO2 applications such as MOSFET high-k metal gate and resistive switching devices and later in the three major groups of ferroelectric non-volatile memory devices.

Graphical abstract: Interplay between oxygen defects and dopants: effect on structure and performance of HfO2-based ferroelectrics

Article information

Article type
Review Article
Submitted
05 feb 2021
Accepted
05 apr 2021
First published
09 apr 2021

Inorg. Chem. Front., 2021,8, 2650-2672

Interplay between oxygen defects and dopants: effect on structure and performance of HfO2-based ferroelectrics

M. Materano, P. D. Lomenzo, A. Kersch, M. H. Park, T. Mikolajick and U. Schroeder, Inorg. Chem. Front., 2021, 8, 2650 DOI: 10.1039/D1QI00167A

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