Multi-metal coordination polymers grown through hybrid molecular layer deposition

Abstract

Coordination polymers deposited by hybrid molecular layer deposition (MLD) techniques are of interest as highly conformal, functional materials. Incorporation of a second metal into these coordination polymers can result in additional functionality or fine tuning of the materials properties. Here, we investigate the deposition of multi-metal coordination polymers using hybrid MLD of Zn–Al and Zn–Hf with ethylene glycol as the organic linker. It is found that facile transmetalation occurs for the Zn–Al films, which results in Al-rich films, but does not take place for the Zn–Hf films. Additionally, the Zn–Hf films are found to be more resilient to ambient conditions than the pure Zn-based coordination polymer.