Issue 9, 2017

Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

Abstract

We developed an in situ measurement technique implemented on a Glow Discharge Optical Emission Spectrometry (GD-OES) instrument, which provides the depth information during the profiling process. The setup is based on a differential interferometer, and we show that a measurement accuracy better than 5% can be obtained for crater depths ranging from 100 nanometers to several tens of micrometers. This development can be directly applied to non-transparent coatings, and brings significant improvement to the quantification process in GD-OES.

Graphical abstract: Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

Article information

Article type
Paper
Submitted
13 Apr. 2017
Accepted
21 Jūn. 2017
First published
21 Jūn. 2017

J. Anal. At. Spectrom., 2017,32, 1798-1804

Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

S. Gaiaschi, S. Richard, P. Chapon and O. Acher, J. Anal. At. Spectrom., 2017, 32, 1798 DOI: 10.1039/C7JA00146K

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