Issue 43, 2022

Emerging laser-assisted vacuum processes for ultra-precision, high-yield manufacturing

Abstract

Laser technology is a cutting-edge process with a unique photothermal response, precise site selectivity, and remote controllability. Laser technology has recently emerged as a novel tool in the semiconductor, display, and thin film industries by providing additional capabilities to existing high-vacuum equipment. The in situ and in operando laser assistance enables using multiple process environments with a level of complexity unachievable with conventional vacuum equipment. This broadens the usable range of process parameters and directly improves material properties, product precision, and device performance. This review paper examines the recent research trends in laser-assisted vacuum processes (LAVPs) as a vital tool for innovation in next-generation manufacturing processing equipment and addresses the unique characteristics and mechanisms of lasers exclusively used in each study. All the findings suggest that the LAVP can lead to methodological breakthroughs in dry etching, 2D material synthesis, and chemical vapor deposition for optoelectronic devices.

Graphical abstract: Emerging laser-assisted vacuum processes for ultra-precision, high-yield manufacturing

Article information

Article type
Minireview
Submitted
04 Jūl. 2022
Accepted
16 Okt. 2022
First published
17 Okt. 2022

Nanoscale, 2022,14, 16065-16076

Emerging laser-assisted vacuum processes for ultra-precision, high-yield manufacturing

E. Hwang, J. Choi and S. Hong, Nanoscale, 2022, 14, 16065 DOI: 10.1039/D2NR03649E

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