Issue 5, 2019

Laboratory based GIXRF and GEXRF spectrometers for multilayer structure investigations

Abstract

This work reports laboratory angle resolved measurements with the goal of establishing laboratory techniques to obtain a more complete idea of the intralayer composition of multilayer samples. While X-ray reflectometry is a widely available technique for the characterization of multilayer samples, angle resolved XRF measurements (grazing emission/incidence X-ray fluorescence) are usually performed at synchrotron radiation facilities. With the development of efficient laboratory spectrometers and evaluation algorithms for angle resolved measurements, these methods become suited for routine measurements and screening. We present two laboratory spectrometers which make quantitative non-destructive elemental depth profiling feasible. For reasons of comparison a validation sample, a nickel–carbon multilayer sample, is measured with both setups and additional information on krypton contamination and its distribution is retrieved. Additionally, the first application for the characterization of multilayer structures with sub-nanometer layer thicknesses is shown.

Graphical abstract: Laboratory based GIXRF and GEXRF spectrometers for multilayer structure investigations

Article information

Article type
Paper
Submitted
05 Des 2018
Accepted
04 Feb 2019
First published
11 Feb 2019
This article is Open Access
Creative Commons BY license

J. Anal. At. Spectrom., 2019,34, 922-929

Laboratory based GIXRF and GEXRF spectrometers for multilayer structure investigations

V. Szwedowski-Rammert, J. Baumann, C. Schlesiger, U. Waldschläger, A. Gross, B. Kanngießer and I. Mantouvalou, J. Anal. At. Spectrom., 2019, 34, 922 DOI: 10.1039/C8JA00427G

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