Jump to main content
Jump to site search
Access to RSC content Close the message box

Continue to access RSC content when you are not at your institution. Follow our step-by-step guide.


Issue 33, 2015
Previous Article Next Article

Scaling of correlation length in lamellae forming PS-b-PMMA thin films upon high temperature rapid thermal treatments

Author affiliations

Abstract

Perpendicularly oriented lamellar forming block copolymers are promising candidates for the fabrication of high aspect ratio nanostructures either by means of direct pattern transfer to the underlying substrate or by sequential infiltration processes. In this work, highly ordered lamellar grains (ξ > 500 nm) were produced by thermally treating the samples at high temperature (Ttarget > 250 °C) in a Rapid Thermal Processing (RTP) machine. The variation of the lateral order of the nanostructures during the annealing process was investigated in detail, by decoupling the effect of the transients and of the isothermal step of the thermal treatment. Moreover, the self-assembly process was studied as a function of the annealing time and temperature in order to identify the processing parameters that maximize the lateral order avoiding, and at the same time, any degradation of the macromolecules. From this study the activation energy (Ea ∼ 55 kJ mol−1) of the lamellar grain coarsening process on featureless substrates was determined. The specific process conditions that promote the self-assembly of lamellar thin films reaching a level of lateral order that is suitable for nanostructure fabrication were established.

Graphical abstract: Scaling of correlation length in lamellae forming PS-b-PMMA thin films upon high temperature rapid thermal treatments

Back to tab navigation

Supplementary files

Article information


Submitted
22 5 2015
Accepted
16 7 2015
First published
20 7 2015

J. Mater. Chem. C, 2015,3, 8618-8624
Article type
Paper

Scaling of correlation length in lamellae forming PS-b-PMMA thin films upon high temperature rapid thermal treatments

M. Ceresoli, F. G. Volpe, G. Seguini, D. Antonioli, V. Gianotti, K. Sparnacci, M. Laus and M. Perego, J. Mater. Chem. C, 2015, 3, 8618
DOI: 10.1039/C5TC01473E

Social activity

Search articles by author

Spotlight

Advertisements