Issue 43, 2022

Growth characteristics and properties of Ga2O3 films fabricated by atomic layer deposition technique

Abstract

Ga2O3 is an ultrawide-band-gap semiconductor with excellent physical properties and promising applications in electronics and photoelectronics. Atomic layer deposition (ALD) is commonly used to fabricate Ga2O3 films with accurate thickness control and high uniformity in both thickness and composition. A comprehensive review of growth characteristics and properties of ALD-deposited Ga2O3 films are presented in this study. Firstly, the reactivity between different Ga and O precursors are introduced clearly. Then, the characterization methods and the influences of the growth parameters on the growth rate, crystal structure, element composition, surface roughness, optical bandgap, and refractive index of ALD-deposited Ga2O3 films are summarized in detail. The related problems to be urgently solved are pointed out at the end. The study is beneficial for modulating the material characteristics and improving the application properties of Ga2O3 films via the ALD method.

Graphical abstract: Growth characteristics and properties of Ga2O3 films fabricated by atomic layer deposition technique

Article information

Article type
Review Article
Submitted
20 7 2022
Accepted
14 10 2022
First published
17 10 2022

J. Mater. Chem. C, 2022,10, 16247-16264

Growth characteristics and properties of Ga2O3 films fabricated by atomic layer deposition technique

X. Liu, S. Wang, L. He, Y. Jia, Q. Lu, H. Chen, F. Ma and Y. Hao, J. Mater. Chem. C, 2022, 10, 16247 DOI: 10.1039/D2TC03054C

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements