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Abstract | Cited by

A stack deposition-annealing (SDA) approach was demonstrated for the synthesis of CuWO4via atomic layer deposition (ALD). The resulted CuWO4 showed promising activity as a photoanode for photoelectrochemical (PEC) water splitting. This methodology can, in principal, be utilized for the ALD of many ternary and quaternary oxides for various applications.

Graphical abstract: Atomic layer stack deposition-annealing synthesis of CuWO4

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