Issue 37, 2018

Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication

Abstract

Although extremely chemically reactive, oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces. In this minireview, a number of representative examples is used to demonstrate key mechanisms and unique capabilities of oxygen plasmas and how these can be used in present-day nano-fabrication. In addition to modification and functionalisation processes typical for oxygen plasmas, their ability to catalyse the growth of complex nanoarchitectures is emphasized. Two types of technologies based on oxygen plasmas, namely surface treatment without a change in the size and shape of surface features, as well as direct growth of oxide structures, are used to better illustrate the capabilities of oxygen plasmas as a powerful process environment. Future applications and possible challenges for the use of oxygen plasmas in nanofabrication are discussed.

Graphical abstract: Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication

Article information

Article type
Minireview
Submitted
12 Там. 2018
Accepted
03 Қыр. 2018
First published
11 Қыр. 2018

Nanoscale, 2018,10, 17494-17511

Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication

K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko and S. Xu, Nanoscale, 2018, 10, 17494 DOI: 10.1039/C8NR06502K

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