Issue 36, 2013

Sensitized excited free-radical processes as read–write tools: impact on non-linear lithographic processes

Abstract

A prefluorescent radical probe in which a 2,2,6,6-tetramethylpiperidine-N-oxyl (TEMPO) unit is sensitized with visible light via energy transfer from a tethered coumarin dye has been synthesized. The excited TEMPO moiety undergoes hydrogen abstraction from a polymer with concomitant functionalization of the polymeric matrix; this writing process can be reversed thermally. The fluorescent probes can be bleached under high intensity illumination, making these new materials suitable for dual-tone lithography with potential applications in sub-diffraction lithographic imaging.

Graphical abstract: Sensitized excited free-radical processes as read–write tools: impact on non-linear lithographic processes

Supplementary files

Article information

Article type
Paper
Submitted
22 Сәу. 2013
Accepted
24 Мау. 2013
First published
25 Мау. 2013

Phys. Chem. Chem. Phys., 2013,15, 14873-14878

Sensitized excited free-radical processes as read–write tools: impact on non-linear lithographic processes

S. Impellizzeri, K. G. Stamplecoskie and Juan. C. Scaiano, Phys. Chem. Chem. Phys., 2013, 15, 14873 DOI: 10.1039/C3CP51723C

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements