Magnetorheological Fluids for Chip-Scale Thermal Management and Adaptive Micro-Systems

Abstract

Magnetorheological fluids (MRFs) are field-responsive suspensions whose rheological properties can be rapidly and reversibly adjusted by external magnetic fields, rendering them promising smart materials for use in adaptive micro-and nano-scale systems. As microelectronic and microelectromechanical devices become increasingly miniaturized and functionally integrated, MRFs are gaining significant attention for chip-related applications such as precision manufacturing, microfluidic control, adaptive thermal management, and micro-vibration suppression. This review provides a comprehensive overview of the fundamental mechanisms, material composition, and classification of MRFs, focusing on the design of particles, the choice of carrier liquids, and the use of functional additives that influence rheological performance, stability, and multifunctionality.Recent advancements in improving yield stress, sedimentation resistance, dynamic response, and thermal transport properties are systematically examined. Additionally, the emerging applications of MRFs in chip manufacturing processes and integrated micro-systems are reviewed, with an analysis of key challenges related to micro-scale confinement, long-term reliability, and compatibility with microfabrication technologies. Finally, potential research directions for the development of multifunctional and intelligent magnetorheological materials in advanced chip-scale systems are proposed.