Composite materials obtained by ion irradiation: Mn implantation in silica glass

Abstract

Ion implantation in silica is a useful way to generate unusual properties in glasses. To use ion implantation as a synthesis technique, it is necessary to understand the dynamics of the process. Silica glass samples, implanted with Mn at 38 keV energy and fluences of 1 × 10¹⁶, 5 × 10¹⁶ and 10 × 10¹⁶ ions cm^–2 were investigated mainly by X-ray photoelectron (XPS), X-ray-excited Auger electron (XE-AES) and UV-photoelectron (UPS) spectroscopies. Rutherford backscattering (RBS) and secondary ion mass spectrometry (SIMS) measurements, optical absorption and electron paramagnetic resonance (EPR) investigations were also performed. Mn silicate is present in all samples, while in the 5 × 10¹⁶ and 10 × 10¹⁶ samples Mn silicide compounds form in the most damaged region. These findings give further support to the two-step model as a simple method to predict the final compounds resulting from ion irradiation of a solid matrix.

References

1. E. Cattaruzza, F. Gonella, G. Mattei, P. Mazzoldi, G. Battaglin, D. Gatteschi, C. Sangregorio, R. Bertoncello and F. Trivillin, Proceedings of the XVIII International Conference on Glass, San Francisco, CA, 1998, ed. M. K. Choudhary, N. T. Huff and C. H. Drummond III, Am. Ceram. Soc., Westerville, OH, 1998, C1113.
2. G. Battaglin, R. Bertoncello, M. Casarin, E. Cattaruzza, P. Colombo, R. Ganzerla, F. Garrido, M. Lenarda, G. Mattei, P. Mazzoldi, F. Trivillin and M. Urbani, Proceedings of the XVIII International Conference on Glass, San Francisco, CA, 1998, ed. M. K. Choudhary, N. T. Huff and C. H. Drummond III, Am. Ceram. Soc., Westerville, OH, 1998, C4, 117.
3. E. Cattaruzza, R. Bertoncello, F. Trivillin, P. Mazzoldi, G. Battaglin, L. Mirenghi and P. Rotolo, J. Mater. Res., 1996, 11, 229.
4. G. Battaglin, R. Bertoncello, M. Casarin, E. Cattaruzza, G. Mattei, P. Mazzoldi, F. Trivillin and M. Urbani, J. Non-Cryst. Solids, 1999, 253, 251.
5. R. Bertoncello, A. Glisenti, G. Granozzi, G. Battaglin, F. Caccavale, E. Cattaruzza and P. Mazzoldi, J. Non-Cryst. Solids, 1993, 162, 205.
6. R. F. Haglund, H. C. Mogul, R. A. Weeks and R. A. Zuhr, J. Non-Cryst. Solids, 1991, 130, 326.
7. H. Hosono, R. A. Weeks, H. Imagawa and R. A. Zuhr, J. Non-Cryst. Solids, 1990, 120, 250.
8. R. H. Magruder, S. H. Morgan, R. A. Weeks and R. A. Zuhr, J. Non-Cryst. Solids, 1990, 120, 241.
9. J. P. Biersack and W. G. Eckstein, Appl. Phys., 1984, 34, 73.
10. D. A. Shirley, Phys. Rev., 1972, 55, 4709.
11. G. Ottaviani, Thin Solid Films, 1986, 140, 3.
12. X-Ray Photoelectron Spectroscopy Database, Version 1.0, National Institute of Standards and Technology, Gaithersburg, MD, 1989.
13. J. F. Moulder, W. F. Stickle, P. E. Sobol and K. D. Bomben, in Handbook of X-Ray Photoelectron Spectroscopy, ed. J. Chastain, Perkin Elmer Corp., Eden Prairie, MN, 1992.
14. M. Oku, K. Hirokawa and S. Ikeda, J. Electron. Spectrosc. Relat. Phenom., 1975, 7, 465.
15. B. R. Strohmeier and D. M. Hercules, J. Phys. Chem., 1984, 88, 4922.
16. C. S. Fadley and D. A. Shirley, Phys. Rev. A, 1970, 2, 1109.
17. E. Cattaruzza, G. Mattei, P. Mazzoldi, R. Bertoncello, G. Battaglin and L. Mirenghi, Appl. Phys. Lett., 1995, 67, 2884.
18. G. W. Arnold, G. De Marchi, P. Mazzoldi and G. Battaglin, Nucl. Instrum. Methods B, 1996, 116, 364.
19. T. Hattori, J. Vac. Sci. Technol. B, 1993, 11, 1528.
20. T. H. DiStefano and D. E. Eastman, Phys. Rev. Lett., 1971, 27, 1560.
21. A. Kakizaki, H. Sugawara, I. Nagakura, Y. Ishikawa, T. Komatsubara and T. Ishii, J. Phys. Soc. Jpn., 1982, 51, 2597.
22. G. Battaglin, R. Bertoncello, E. Cattaruzza, P. Mazzoldi and M. Ricci, unpublished work.
23. H. Hosono, Jpn. J. Appl. Phys., 1993, 32, 3892.
24. H. Hosono, J. Non-Cryst. Solids, 1995, 187, 457.
25. O. Knacke, O. Kubaschewski and K. Hesselmann, Thermochemical Properties of Inorganic Substances, Springer-Verlag, Berlin, Heidelberg, 2nd edn., 1991.
26. H. Hosono and H. Imagawa, Nucl. Instrum. Methods B, 1994, 91, 510.
27. L. Pasimeni, G. Leo and L. Vasanelli, Solid State Commun., 1993, 88, 317.
28. G. Whichard and R. A. Weeks, J. Non-Cryst. Solids, 1989, 112, 1.