Issue 3, 2022

Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O3 as the oxygen source

Abstract

Toxic Pb-containing piezo-, pyro- and ferroelectrics continue to dominate the market even though they were banned from use in consumer products more than a decade ago. There is a strong need for sustainable alternatives, but the lack of facile synthesis routes for thin films exhibiting suitable functional properties have limited the transition from Pb workhorse materials like Pb(Zr,Ti)O3 and Pb(Mg,Nb)O3 – PbTiO3. Atomic layer deposition has proven capable of the deposition of possible successors, such as LiNbO3, (K,Na)NbO3 and K(Ta,Nb)O3, albeit with limited control due to water reservoir effects resulting from the hygroscopicity of intermediate products. In this article, we show that replacing H2O with O3 in the deposition of complex alkali oxides provides an alternative and much more controlled process. We exemplify this by deposition of crystalline K(Ta,Nb)O3 with high compositional control and over a larger composition range than previously reported. This opens new doors to a simplified synthesis of polar functional lead-free alternatives.

Graphical abstract: Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O3 as the oxygen source

Supplementary files

Article information

Article type
Paper
Submitted
23 nóv. 2021
Accepted
14 des. 2021
First published
14 des. 2021
This article is Open Access
Creative Commons BY-NC license

Dalton Trans., 2022,51, 927-934

Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O3 as the oxygen source

H. H. Sønsteby, V. A.-L. K. Killi, L. M. Rykkje, J. R. Bickford, E. G. Martin, R. C. Hoffman and O. Nilsen, Dalton Trans., 2022, 51, 927 DOI: 10.1039/D1DT03960A

This article is licensed under a Creative Commons Attribution-NonCommercial 3.0 Unported Licence. You can use material from this article in other publications, without requesting further permission from the RSC, provided that the correct acknowledgement is given and it is not used for commercial purposes.

To request permission to reproduce material from this article in a commercial publication, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party commercial publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements