A correlative method to quantitatively image trace concentrations of elements by combined SIMS-EDX analysis

Abstract

The study demonstrates a new method to quantify Secondary Ion Mass Spectrometry (SIMS) data by using a synergetic combination of Energy Dispersive X-ray spectroscopy (EDX) and SIMS. The novelty of this approach lies in using a diffusion couple to produce a continuum of concentration variation to cover a large portion of the composition space (100 at% to sub-1000 ppm) in a single sample. Furthermore, this approach encompasses the concentration-dependent Relative Sensitivity Factor (RSF) which is essential when the concentrations span several orders of magnitude. By correlating EDX and SIMS profiles, the SIMS signal intensity can be converted to concentrations far below the detection limit of the EDX technique.