Recent Advances in the Application of Magnetron Sputtering for Lithium Metal Batteries

Abstract

Lithium metal batteries (LMBs), with their high theoretical capacity (3860 mAh/g) and low electrode potential (-3.04 V vs. SHE), are regarded as an ideal system to overcome the energy density limitations of conventional lithium-ion batteries. However, the uncontrolled growth of lithium dendrites and interfacial side reactions at the lithium metal anode severely compromise battery safety, hindering their commercial viability. To address these challenges, magnetron sputtering (MS) technology has emerged as a critical strategy for regulating lithium deposition behavior and stabilizing interfaces, owing to its high precision, controllability, and superior film uniformity. This review systematically summarizes recent advancements in MS applications for key LMBs components (anodes, current collectors, solid-state electrolytes, separators, and artificial SEI layers) especially on novel target design, structure design (2D and 3D), gradient design, and multilayer design, outlines characterization methodologies for interface modulation, and elucidates the structure-property-performance relationships of sputtered films.