Min Jeong Kim, Ojun Kwon, Seyoung Oh, Eunjeong Cho, Wondeok Seo, Yeongeun Kwon, Shinhoi Kim, Minhee Kim, Kyungmin Lee, Minyoung Choi, Ah Ra Kim, Jongwon Yoon, Woojin Park and Byungjin Cho
Materials Science in Semiconductor Processing, 2026, 206, 110443
DOI: 10.1016/j.mssp.2026.110443