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CHAPTER 3

Micro/nano Fabrication Technologies for Vibration-Based Energy Harvester

Energy harvesting technologies have emerged as a prominent research topic and been quickly developed in recent years due to its wide application, such as wireless sensor nodes for structural health monitoring, biomedical applications for implanted sensors, and automobile applications for tire pressure sensors. Recent development focuses on the novel material, structural optimized design, process integration of micro to nanoscale energy harvesters. This chapter demonstrates the micromachining technologies for the fabrication of micro/nanoscale energy harvesters.

Publication details


Print publication date
25 Mar 2014
Copyright year
2014
Print ISBN
978-1-84973-640-4
PDF eISBN
978-1-78262-338-0
ePub eISBN
978-1-78262-131-7