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Chapter 4

Microwave Safety

A microwave plasma system can be assembled by connecting several functional blocks, such as a microwave power supply, a circulator or isolator with water load or water cooling impedance tuners and a cavity applicator. The last is equipped with a gas supply, an optical pick-up assembly or ion sucking...
Print publication date: 24 Nov 2010
Copyright year: 2011
Print ISBN: 978-1-84973-052-5
PDF eISBN: 978-1-84973-214-7