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Chapter 13

Commercial Aspects of CVD

The chemical vapor deposition (CVD) process is a very versatile method for coating surfaces with uniform thin films. In its many forms it supports several worldwide industries and has been widely used in volume commercial production for many years. CVD can accurately provide critical materials depos...
Print publication date: 22 Dec 2008
Copyright year: 2009
Print ISBN: 978-0-85404-465-8
PDF eISBN: 978-1-84755-879-4