Jump to main content
Jump to site search

All chapters
Previous chapter Next chapter

Chapter 12

Plasma Enhanced Chemical Vapour Deposition Processes

As has been mentioned elsewhere, most chemical reactions in CVD are thermodynamically endothermic and/or have an apparent kinetic energy of activation associated with them. Generally, this is an advantage since the reactions can be controlled by regulating the energy input. As is apparent, though, f...
Print publication date: 22 Dec 2008
Copyright year: 2009
Print ISBN: 978-0-85404-465-8
PDF eISBN: 978-1-84755-879-4