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Chapter 11

Photo-assisted CVD

There are different ways of enhancing the growth rate of CVD or modifying the film properties using various forms of energy assistance. CVD relies on thermal chemistry to bring about a reaction of the precursors either in the gas phase or on the film surface. In some cases it is necessary to achieve...
Print publication date: 22 Dec 2008
Copyright year: 2009
Print ISBN: 978-0-85404-465-8
PDF eISBN: 978-1-84755-879-4