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Chapter 9

Metal-organic Chemical Vapour Deposition of Refractory Transition Metal Nitrides

Thin films and coatings of the binary nitrides MN of the refractory, “early” transition metals (M = Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W) have many applications because of their rather unique combination of chemical and physical properties. Transition metal nitrides exhibit impressive properties that in...
Print publication date: 22 Dec 2008
Copyright year: 2009
Print ISBN: 978-0-85404-465-8
PDF eISBN: 978-1-84755-879-4