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Chapter 8

Chemical Vapour Deposition of Metal Oxides for Microelectronics Applications

Thin films of metal oxides are finding an ever increasing application in the fields of microelectronics and telecommunications, such as next-generation computer memories, microprocessors, infrared detectors, optical wave-guides and electro-optic storage1(Table 8.1).
Print publication date: 22 Dec 2008
Copyright year: 2009
Print ISBN: 978-0-85404-465-8
PDF eISBN: 978-1-84755-879-4