Jump to main content
Jump to site search

All chapters
Previous chapter Next chapter

Chapter 3

Modeling CVD Processes

The modeling of CVD systems is in some ways a mature field, resting on scientific foundations in the fields of fluid dynamics, thermodynamics, gas-phase kinetics and surface science. Much of the theory and methods used to model the chemically reacting flows occurring in CVD systems are an outgrowth ...

Publication details


Print publication date
22 Dec 2008
Copyright year
2009
Print ISBN
978-0-85404-465-8
PDF eISBN
978-1-84755-879-4