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Chapter 3

Modeling CVD Processes

The modeling of CVD systems is in some ways a mature field, resting on scientific foundations in the fields of fluid dynamics, thermodynamics, gas-phase kinetics and surface science. Much of the theory and methods used to model the chemically reacting flows occurring in CVD systems are an outgrowth ...

Publication details

Print publication date
22 Dec 2008
Copyright year
2009
Print ISBN
978-0-85404-465-8
PDF eISBN
978-1-84755-879-4