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Chapter 3

Modeling CVD Processes

The modeling of CVD systems is in some ways a mature field, resting on scientific foundations in the fields of fluid dynamics, thermodynamics, gas-phase kinetics and surface science. Much of the theory and methods used to model the chemically reacting flows occurring in CVD systems are an outgrowth ...
Print publication date: 22 Dec 2008
Copyright year: 2009
Print ISBN: 978-0-85404-465-8
PDF eISBN: 978-1-84755-879-4