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Chapter 2

CVD Reactors and Delivery System Technology

From the engineering perspective, the CVD system is essentially a “molecular scale” manufacturing facility. Just like any factory, the production rate is determined by the slowest step in the manufacturing process. The product quality, production economy and efficiency are assured by initial process...
Print publication date: 22 Dec 2008
Copyright year: 2009
Print ISBN: 978-0-85404-465-8
PDF eISBN: 978-1-84755-879-4
Citation: