Jump to main content
Jump to site search
Access to RSC content Close the message box

Continue to access RSC content when you are not at your institution. Follow our step-by-step guide.

All chapters
Previous chapter Next chapter

Chapter 2

CVD Reactors and Delivery System Technology

From the engineering perspective, the CVD system is essentially a “molecular scale” manufacturing facility. Just like any factory, the production rate is determined by the slowest step in the manufacturing process. The product quality, production economy and efficiency are assured by initial process...

Publication details

Print publication date
22 Dec 2008
Copyright year
Print ISBN