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Chapter 1

Overview of Chemical Vapour Deposition

In the broadest sense chemical vapour deposition (CVD) involves the formation of a thin solid film on a substrate material by a chemical reaction of vapour-phase precursors. It can thus be distinguished from physical vapour deposition (PVD) processes, such as evaporation and reactive sputtering, whi...

Publication details


Print publication date
22 Dec 2008
Copyright year
2009
Print ISBN
978-0-85404-465-8
PDF eISBN
978-1-84755-879-4