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Chapter 1

Overview of Chemical Vapour Deposition

In the broadest sense chemical vapour deposition (CVD) involves the formation of a thin solid film on a substrate material by a chemical reaction of vapour-phase precursors. It can thus be distinguished from physical vapour deposition (PVD) processes, such as evaporation and reactive sputtering, whi...
Print publication date: 22 Dec 2008
Copyright year: 2009
Print ISBN: 978-0-85404-465-8
PDF eISBN: 978-1-84755-879-4